Automated performance optimisation and layout synthesis of MEMS accelerometer with sigma-delta force-feedback control loop
Kazmierski, T.J. (2008) Automated performance optimisation and layout synthesis of MEMS accelerometer with sigma-delta force-feedback control loop. 2008 IEEE International Behavioral Modeling and Simulation Workshop, 19-24.
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Description/Abstract
This contribution presents a novel methodology for automated optimal design of a MEMS accelerometer with Sigma-Delta force-feedback control loop from user defined high-level performance specifications and design constraints. The proposed approach is based on a simulation-based optimization technology using a genetic algorithm. The layout of the mechanical sensing element is generated simultaneously with the optimal design parameters of the Sigma-Delta control loop. As currently available implementations of AMS HDL languages are not suitable for complex mixed-technology system optimisation, the algorithm as well as aa fast dedicated sigma-delta accelerometer simulator have been implemented in C++. The underlying accelerometer model includes the sense finger dynamics described by a partial differential equation, which enables accurate performance prediction of the sensing element embedded in a in mixed-technology control loop.
| Item Type: | Article |
|---|---|
| Additional Information: | Imported from ISI Web of Science |
| Divisions: | Faculty of Physical and Applied Science > Electronics and Computer Science > EEE |
| Item ID: | 269752 |
| Date Deposited: | 21 Apr 2010 07:46 |
| Last Modified: | 01 Mar 2012 11:59 |
| Contributors: | Kazmierski, T.J. (Author) |
| Date: | 2008 |
| Additional Information: | Imported from ISI Web of Science |
| Status: | Unpublished |
| Further Information: | Google Scholar |
| URI: | http://eprints.soton.ac.uk/id/eprint/269752 |
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