Analysis of sense finger dynamics for accurate Sigma Delta MEMS accelerometer modelling in VHDL-AMS
Kazmierski, T.J. (2009) Analysis of sense finger dynamics for accurate Sigma Delta MEMS accelerometer modelling in VHDL-AMS. 2009 Forum on Specification & Design Languages (FDL 2009), 4 pp.-.
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Description/Abstract
The sense finger dynamics in the capacitive MEMS accelerometer affect the performance of electromechanical mixed-domain Sigma-Delta control loop. Correct behaviour can not be correctly predicted by conventional lumped model of the mechanical sensing element. This contribution presents an improved distributed mechanical model implemented in VHDL-AMS and detailed analysis of how sense finger dynamics affect the operation of the accelerometer when the system is subjected by jolt and step excitations. Such excitations are common in typical MEMS accelerometer applications in automobile safety systems.
| Item Type: | Article |
|---|---|
| Additional Information: | Imported from ISI Web of Science |
| Divisions: | Faculty of Physical and Applied Science > Electronics and Computer Science > EEE |
| Item ID: | 270066 |
| Date Deposited: | 21 Apr 2010 07:46 |
| Last Modified: | 01 Mar 2012 11:59 |
| Contributors: | Kazmierski, T.J. (Author) |
| Date: | 2009 |
| Additional Information: | Imported from ISI Web of Science |
| Status: | Unpublished |
| Further Information: | Google Scholar |
| URI: | http://eprints.soton.ac.uk/id/eprint/270066 |
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