Sigma-delta Modulator Based Control Systems for MEMS Gyroscopes

Kraft, M and Ding, HT (2009) Sigma-delta Modulator Based Control Systems for MEMS Gyroscopes. 2009 4TH IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS, VOLS 1 AND 2, 41-46.


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In this paper a review is presented about recent developments of using sigma-delta modulator (SDM) control systems for micromachined, capacitive vibratory rate MEMS gyroscopes. The design choices, their benefits and disadvantages are briefly discussed. As the most promising control system, a higher order, band-pass SDM is identified since it achieves high quantization noise shaping at a relatively low sampling frequency, in addition to the normal closed loop, force feedback control advantages such as improved bandwidth, linearity and dynamic range. Previous work applied this type of control system to gyroscopes with a relatively small proof mass. Here, results are presented applying the approach to a comparatively large, bulk-micromachined gyroscope sensing element, which has the potential to result in a high performance sensor. System level simulations are presented illustrating the benefits of the approach.

Item Type: Article
Additional Information: Imported from ISI Web of Science
Divisions : Faculty of Physical Sciences and Engineering > Electronics and Computer Science > NANO
ePrint ID: 270107
Accepted Date and Publication Date:
Date Deposited: 21 Apr 2010 07:46
Last Modified: 31 Mar 2016 14:17
Further Information:Google Scholar

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