A new design methodology for electro-mechanical Sigma-Delta-Modulators
Kraft, M. (2009) A new design methodology for electro-mechanical Sigma-Delta-Modulators. 2009 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2009), 881-4|xxxvi+1119.
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Description/Abstract
Sigma-Delta-Modulators (SDM) are the most successful technique for analog-to-digital (A/D) conversion, especially for high resolution applications. Similar techniques and architectures have been applied to micro-electro-mechanical systems (MEMS) by incorporating a micromachined sensing element in a SDM force-feedback loop. However, compared to the design of purely electrical SDM there are important differences due to the integration of the sensing element regarding stability and performance. As a result, there are very few systematic methods for the design of electro-mechanical SDM compared to purely electrical SDM. In this paper, a new systematic design methodology is proposed to realize an electro-mechanical SDM system which is demonstrated at system level for a bulk micromachined, capacitive accelerometer.
| Item Type: | Article |
|---|---|
| Additional Information: | Imported from ISI Web of Science |
| Divisions: | Faculty of Physical and Applied Science > Electronics and Computer Science > NANO |
| Item ID: | 270110 |
| Date Deposited: | 21 Apr 2010 07:46 |
| Last Modified: | 01 Mar 2012 11:59 |
| Contributors: | Kraft, M. (Author) |
| Date: | 2009 |
| Additional Information: | Imported from ISI Web of Science |
| Status: | Unpublished |
| Further Information: | Google Scholar |
| ISI Citation Count: | 1 |
| URI: | http://eprints.soton.ac.uk/id/eprint/270110 |
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