Fe/Ge catalyzed carbon nanotube growth on HfO/sub 2/ for nano-sensor applications
Uchino, T., Ayre, G.N., Smith, D.C., Hutchison, J.L., de Groot, C.H. and Ashburn, P. (2009) Fe/Ge catalyzed carbon nanotube growth on HfO/sub 2/ for nano-sensor applications. Proceedings of the 39th European Solid-State Device Research Conference. ESSDERC 2009, 197-200.
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Description/Abstract
A carbon nanotube (CNT) growth process on HfO/sub 2/ is reported for the first time for application in nano-sensors. The process uses a combination of Ge nanoparticles and ferric nitrate dispersion and achieves an increase in CNT density from 0.15 to 6.2 mu m length/ mu m/sup 2/ compared with the use of ferric nitrate dispersion alone. The growth process is validated by the fabrication of back-gate CNT field-effect transistors (CNTFETs) using Al source/drain (S/D) contacts and a H/sub 2/ anneal at 400 degrees C. The transistors exhibit p-FET behavior with an I/sub on//I/sub off/ ratio of 10/sup 5/ and a steep sub-threshold slope of 130 mV/dec. These results are rather surprising, as earlier research in the literature on CNTFETs with Al S/D electrodes showed n-FET behavior. The p-FET behavior is shown to be due to the H/sub 2/ anneal, which we ascribe to the smaller electron affinity of hydrogenised CNTs. Measurements of the temperature dependence of the drain current show low Schottky barrier height Al S/D contacts after a H/sub 2/ anneal, which tends to confirm this explanation.
| Item Type: | Article |
|---|---|
| Additional Information: | Imported from ISI Web of Science |
| Divisions: | Faculty of Physical and Applied Science > Electronics and Computer Science > NANO |
| Item ID: | 270359 |
| Date Deposited: | 21 Apr 2010 07:46 |
| Last Modified: | 02 Mar 2012 12:42 |
| Contributors: | Uchino, T. (Author) Ayre, G.N. (Author) Smith, D.C. (Author) Hutchison, J.L. (Author) de Groot, C.H. (Author) Ashburn, P. (Author) |
| Date: | 2009 |
| Additional Information: | Imported from ISI Web of Science |
| Status: | Unpublished |
| Further Information: | Google Scholar |
| URI: | http://eprints.soton.ac.uk/id/eprint/270359 |
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