Electromechanical Simulation of Switching Characteristics for Nanoelectromechanical Memory
Nagami, T, Tsuchiya, Y, Saito, S, Arai, T, Shimada, T, Mizuta, H and Oda, S (2009) Electromechanical Simulation of Switching Characteristics for Nanoelectromechanical Memory. JAPANESE JOURNAL OF APPLIED PHYSICS, 48, -.
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Description/Abstract
The static switching properties and readout characteristics of proposed high-speed and nonvolatile nanoelectromechanical (NEM) memory devices are investigated By conducting a three-dimensional finite element mechanical simulation combined with an electrostatic analysis, we analyze the electromechanical switching operation of a mechanically bistable NEM floating gate by applying gate voltage. We show that switching voltage can be reduced to less than 10V by reducing the zero-bias displacement of the floating gate and optimizing the cavity structure to improve mechanical symmetry. We also analyze the electrical readout property of the NEM memory devices by combining the electromechanical simulation with a drift-diffusion analysis We demonstrate that the mechanically bistable states of the floating gate can be detected via the changes in drain current with an ON/OFF current ratio of about 3 x 10 (C) 2009 The Japan Society of Applied Physics
| Item Type: | Article |
|---|---|
| Additional Information: | Imported from ISI Web of Science |
| Divisions: | Faculty of Physical and Applied Science > Electronics and Computer Science > NANO |
| Item ID: | 270367 |
| Date Deposited: | 21 Apr 2010 07:46 |
| Last Modified: | 26 Apr 2013 04:52 |
| Contributors: | Nagami, T (Author) Tsuchiya, Y (Author) Saito, S (Author) Arai, T (Author) Shimada, T (Author) Mizuta, H (Author) Oda, S (Author) |
| Date: | 2009 |
| Additional Information: | Imported from ISI Web of Science |
| Status: | Unpublished |
| Further Information: | Google Scholar |
| ISI Citation Count: | 2 |
| URI: | http://eprints.soton.ac.uk/id/eprint/270367 |
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