Fabrication of MEMS components using ultra fine grained aluminium

Qiao, X, Gao, N, Moktadir, Zakaria, Michael, Kraft and Starvink, M J (2010) Fabrication of MEMS components using ultra fine grained aluminium. J. Micromech.Microeng, 20, (4), 045029.

Download

PDF
Download (10Mb)

Description/Abstract

Not available

Item Type:	Article
Divisions:	Faculty of Physical and Applied Science > Electronics and Computer Science > NANO
Item ID:	270883
Date Deposited:	21 Apr 2010 10:18
Last Modified:	04 Jul 2012 14:29
Contributors:	Qiao, X (Author) Gao, N (Author) Moktadir, Zakaria (Author) Michael, Kraft (Author) Starvink, M J (Author)
Date:	2010
Status:	Published
Further Information:	Google Scholar
URI:	http://eprints.soton.ac.uk/id/eprint/270883

URI:
RDF:	RDF+N-Triples, RDF+N3, RDF+XML, Browse.

Actions (login required)

View Item