An automated design flow for MEMS accelerometers with Sigma-Delta control
Zhao, Chenxu and Kazmierski, Tom (2010) An automated design flow for MEMS accelerometers with Sigma-Delta control. At ICIA 2010
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This contribution presents a novel methodology for automated optimal design of MEMS accelerometers embedded in electronic control circuitry from user defined high-level performance specifications and design constraints. The proposed approach is based on simulation-based optimisation where automated configuration selection for electronic blocks and synthesis of mechanical layouts are coupled with calculations of optimal design parameters. The underlying dedicated MEMS simulator supports distributed mechanical dynamics to enable accurate performance prediction of critical mechanical components, such as acceleration sensing elements which form an essential part of the mixed-technology control loop.
|Item Type:||Conference or Workshop Item (Speech)|
|Divisions:||Faculty of Physical and Applied Science > Electronics and Computer Science > EEE
|Date Deposited:||05 Jul 2010 10:31|
|Last Modified:||01 Mar 2012 12:03|
|Contributors:||Zhao, Chenxu (Author)
Kazmierski, Tom (Author)
|Further Information:||Google Scholar|
|RDF:||RDF+N-Triples, RDF+N3, RDF+XML, Browse.|
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