Moktadir, Zakaria, Boden, Stuart, Mizuta, Hiroshi and Rutt, Harvey
Graphene for Nano-Electro-Mechanical Systems.
At 21st Micromechanics and Micro Systems Europe Workshop (MME2010), Enschede, The , Netherlands,
26 - 29 Sep 2010.
We discuss the prospect of graphene as a material for nano-electro-mechanical-systems. A comparison between SOI silicon and graphene fabrication technologies is presented as well new ideas for integrated new electromechanical devices combining novel electronic and mechanical proper-ties of graphene. We also present new results of graphene nanostructuring with the helium ion microscope as an emerging technology for fabrica-tion of electromechanical devices.
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