Graphene for Nano-Electro-Mechanical Systems
Moktadir, Zakaria, Boden, Stuart, Mizuta, Hiroshi and Rutt, Harvey (2010) Graphene for Nano-Electro-Mechanical Systems. At 21st Micromechanics and Micro Systems Europe Workshop (MME2010), Enschede, The , Netherlands, 26 - 29 Sep 2010.
- Accepted Manuscript
We discuss the prospect of graphene as a material for nano-electro-mechanical-systems. A comparison between SOI silicon and graphene fabrication technologies is presented as well new ideas for integrated new electromechanical devices combining novel electronic and mechanical proper-ties of graphene. We also present new results of graphene nanostructuring with the helium ion microscope as an emerging technology for fabrica-tion of electromechanical devices.
|Item Type:||Conference or Workshop Item (Poster)|
|Additional Information:||Event Dates: 26-29 September 2010|
|Keywords:||Graphene, Helium ion microscope, NEMS, MEMS|
|Divisions :||Faculty of Physical Sciences and Engineering > Electronics and Computer Science
Faculty of Physical Sciences and Engineering > Electronics and Computer Science > NANO
|Accepted Date and Publication Date:||
|Date Deposited:||12 Jul 2010 10:17|
|Last Modified:||31 Mar 2016 14:18|
|Further Information:||Google Scholar|
|RDF:||RDF+N-Triples, RDF+N3, RDF+XML, Browse.|
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