Graphene for Nano-Electro-Mechanical Systems
Moktadir, Zakaria, Boden, Stuart, Mizuta, Hiroshi and Rutt, Harvey (2010) Graphene for Nano-Electro-Mechanical Systems. At 21st Micromechanics and Micro Systems Europe Workshop (MME2010), Enschede, The , Netherlands, 26 - 29 Sep 2010. (Submitted).
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Description/Abstract
We discuss the prospect of graphene as a material for nano-electro-mechanical-systems. A comparison between SOI silicon and graphene fabrication technologies is presented as well new ideas for integrated new electromechanical devices combining novel electronic and mechanical proper-ties of graphene. We also present new results of graphene nanostructuring with the helium ion microscope as an emerging technology for fabrica-tion of electromechanical devices.
| Item Type: | Conference or Workshop Item (Poster) |
|---|---|
| Additional Information: | Event Dates: 26-29 September 2010 |
| Keywords: | Graphene, Helium ion microscope, NEMS, MEMS |
| Divisions: | Faculty of Physical and Applied Science > Electronics and Computer Science Faculty of Physical and Applied Science > Electronics and Computer Science > NANO |
| Item ID: | 271381 |
| Date Deposited: | 12 Jul 2010 10:17 |
| Last Modified: | 01 Mar 2012 14:30 |
| Contributors: | Moktadir, Zakaria (Author) Boden, Stuart (Author) Mizuta, Hiroshi (Author) Rutt, Harvey (Author) |
| Date: | 12 July 2010 |
| Additional Information: | Event Dates: 26-29 September 2010 |
| Status: | Submitted |
| Contact Email Address: | zm@ecs.soton.ac.uk |
| Further Information: | Google Scholar |
| URI: | http://eprints.soton.ac.uk/id/eprint/271381 |
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