Graphene for Nano-Electro-Mechanical Systems


Moktadir, Zakaria, Boden, Stuart, Mizuta, Hiroshi and Rutt, Harvey (2010) Graphene for Nano-Electro-Mechanical Systems. At 21st Micromechanics and Micro Systems Europe Workshop (MME2010), Enschede, The , Netherlands, 26 - 29 Sep 2010. (Submitted).

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Description/Abstract

We discuss the prospect of graphene as a material for nano-electro-mechanical-systems. A comparison between SOI silicon and graphene fabrication technologies is presented as well new ideas for integrated new electromechanical devices combining novel electronic and mechanical proper-ties of graphene. We also present new results of graphene nanostructuring with the helium ion microscope as an emerging technology for fabrica-tion of electromechanical devices.

Item Type: Conference or Workshop Item (Poster)
Additional Information: Event Dates: 26-29 September 2010
Keywords: Graphene, Helium ion microscope, NEMS, MEMS
Divisions: Faculty of Physical Sciences and Engineering > Electronics and Computer Science
Faculty of Physical Sciences and Engineering > Electronics and Computer Science > NANO
ePrint ID: 271381
Date Deposited: 12 Jul 2010 10:17
Last Modified: 27 Mar 2014 20:16
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/271381

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