Scaled Silicon Nanoelectromechanical (NEM) Hybrid Systems
Mizuta, Hiroshi, Garcia Ramirez, Mario, Arab Hassani, Faezeh, Ghiass, Mohammad Adel, Kalhor, Nima, Moktadir, Zakaria, Tsuchiya, Yoshishige, Sawai, S, Ogi, Jun and Oda, S (2010) Scaled Silicon Nanoelectromechanical (NEM) Hybrid Systems. At International Conference on Solid-State and Integrated Circuit Technology (Invited Talk), Shanghai, China, 01 - 04 Nov 2010.
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Description/Abstract
In this paper we overview recent attempts at co-integrating silicon nano-electro-mechanical systems (NEMS) with nanoelectronic devices aiming to add more functionalities to conventional electronic devices in ‘More-than-Moore’ domain and also explore novel operating principles in ‘Beyond CMOS’ domain.
| Item Type: | Conference or Workshop Item (Speech) |
|---|---|
| Additional Information: | Event Dates: Nov. 1- 4 |
| Divisions: | Faculty of Physical and Applied Science > Electronics and Computer Science > NANO |
| Item ID: | 271634 |
| Date Deposited: | 18 Oct 2010 12:39 |
| Last Modified: | 02 Mar 2012 11:41 |
| Contributors: | Mizuta, Hiroshi (Author) Garcia Ramirez, Mario (Author) Arab Hassani, Faezeh (Author) Ghiass, Mohammad Adel (Author) Kalhor, Nima (Author) Moktadir, Zakaria (Author) Tsuchiya, Yoshishige (Author) Sawai, S (Author) Ogi, Jun (Author) Oda, S (Author) |
| Date: | 1 November 2010 |
| Additional Information: | Event Dates: Nov. 1- 4 |
| Status: | Unpublished |
| Further Information: | Google Scholar |
| URI: | http://eprints.soton.ac.uk/id/eprint/271634 |
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