Scaled Silicon Nanoelectromechanical (NEM) Hybrid Systems
Scaled Silicon Nanoelectromechanical (NEM) Hybrid Systems
In this paper we overview recent attempts at co-integrating silicon nano-electro-mechanical systems (NEMS) with nanoelectronic devices aiming to add more functionalities to conventional electronic devices in ‘More-than-Moore’ domain and also explore novel operating principles in ‘Beyond CMOS’ domain.
Mizuta, Hiroshi
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Garcia Ramirez, Mario
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Arab Hassani, Faezeh
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Ghiass, Mohammad Adel
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Kalhor, Nima
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Moktadir, Zakaria
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Tsuchiya, Yoshishige
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Sawai, S
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Ogi, Jun
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Oda, S
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Mizuta, Hiroshi
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Garcia Ramirez, Mario
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Arab Hassani, Faezeh
489be2da-4cc2-40fd-8c1a-77d7fa7333a2
Ghiass, Mohammad Adel
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Kalhor, Nima
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Moktadir, Zakaria
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Tsuchiya, Yoshishige
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Sawai, S
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Ogi, Jun
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Oda, S
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Mizuta, Hiroshi, Garcia Ramirez, Mario, Arab Hassani, Faezeh, Ghiass, Mohammad Adel, Kalhor, Nima, Moktadir, Zakaria, Tsuchiya, Yoshishige, Sawai, S, Ogi, Jun and Oda, S
(2010)
Scaled Silicon Nanoelectromechanical (NEM) Hybrid Systems.
International Conference on Solid-State and Integrated Circuit Technology (Invited Talk), Shanghai, China.
01 - 04 Nov 2010.
(In Press)
Record type:
Conference or Workshop Item
(Other)
Abstract
In this paper we overview recent attempts at co-integrating silicon nano-electro-mechanical systems (NEMS) with nanoelectronic devices aiming to add more functionalities to conventional electronic devices in ‘More-than-Moore’ domain and also explore novel operating principles in ‘Beyond CMOS’ domain.
Text
paper_118_(2).pdf
- Other
More information
Accepted/In Press date: 1 November 2010
Additional Information:
Event Dates: Nov. 1- 4
Venue - Dates:
International Conference on Solid-State and Integrated Circuit Technology (Invited Talk), Shanghai, China, 2010-11-01 - 2010-11-04
Organisations:
Nanoelectronics and Nanotechnology
Identifiers
Local EPrints ID: 271634
URI: http://eprints.soton.ac.uk/id/eprint/271634
PURE UUID: 50960a3e-220f-4f1f-9383-3e5b48733454
Catalogue record
Date deposited: 18 Oct 2010 12:39
Last modified: 14 Mar 2024 09:36
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Contributors
Author:
Hiroshi Mizuta
Author:
Mario Garcia Ramirez
Author:
Faezeh Arab Hassani
Author:
Mohammad Adel Ghiass
Author:
Nima Kalhor
Author:
Zakaria Moktadir
Author:
Yoshishige Tsuchiya
Author:
S Sawai
Author:
Jun Ogi
Author:
S Oda
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