Deep level dopant compensated Czochralski silicon substrates for MMICs
Mallik, Kanad, Abuelgasim, Ahmed, Ashburn, Peter and De Groot, Kees (2010) Deep level dopant compensated Czochralski silicon substrates for MMICs. At ARMMS RF & Microwave Society Conference , Northampton,
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Description/Abstract
The requirement for high resistivity single crystal silicon substrates for microwave monolithic integrated circuit (MMIC) applications above 1 GHz has been underlined in the ITRS Roadmaps, 2007 and 2009. We show that the resistivity of standard Czochralski silicon (Cz-Si) wafers can be enhanced from nominally 50 Ωcm to approximately 15 kΩcm, measured at about 20 oC using compensation by deep level (DL) impurity states of gold (Au), which was implanted into Cz-Si. We proposed a fully encapsulated Au-doped handle wafer for a SOI wafer configuration to solve the problem of Au contamination of the active wafer. The details have been discussed in our previous publications and a patent. In the present paper, we show significant reduction of RF attenuation in 1-40 GHz range in the DL-doped Si wafers, measured using co-planar waveguide (CPW) test structures fabricated on the material. Notably, the DL-doped wafers have a bi-layer resistivity profile. Our full 3D electromagnetic simulations using Ansys/Ansoft HFSS show significant enhancement of the quality (Q) factor of spiral inductors made on the material.
| Item Type: | Conference or Workshop Item (Speech) |
|---|---|
| Additional Information: | Event Dates: November 2010 |
| Divisions: | Faculty of Physical and Applied Science > Electronics and Computer Science > NANO |
| Item ID: | 271787 |
| Date Deposited: | 15 Dec 2010 11:14 |
| Last Modified: | 02 Mar 2012 13:43 |
| Contributors: | Mallik, Kanad (Author) Abuelgasim, Ahmed (Author) Ashburn, Peter (Author) De Groot, Kees (Author) |
| Date: | November 2010 |
| Additional Information: | Event Dates: November 2010 |
| Status: | Unpublished |
| Further Information: | Google Scholar |
| URI: | http://eprints.soton.ac.uk/id/eprint/271787 |
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