Realisation of electroplating moulds with different thick photoresists for MEMS applications, Eurosensors XIV Conference, September 15-18, Prague, Czech Republic, 2002, pp. 103-104


Kukharenka,, E and Kraft, M (2002) Realisation of electroplating moulds with different thick photoresists for MEMS applications, Eurosensors XIV Conference, September 15-18, Prague, Czech Republic, 2002, pp. 103-104. At Eurosensors XIV Conference, Prague, Czech Republic, 15 - 18 Sep 2002. , 95-98.

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Item Type: Conference or Workshop Item (Poster)
Additional Information: Event Dates: September 15-18
Divisions: Faculty of Physical Sciences and Engineering > Electronics and Computer Science > NANO
Faculty of Physical Sciences and Engineering > Electronics and Computer Science > EEE
ePrint ID: 271826
Date Deposited: 22 Dec 2010 11:24
Last Modified: 27 Mar 2014 20:17
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/271826

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