Realisation of electroplating moulds with different thick photoresists for MEMS applications, Eurosensors XIV Conference, September 15-18, Prague, Czech Republic, 2002, pp. 103-104
Kukharenka,, E and Kraft, M (2002) Realisation of electroplating moulds with different thick photoresists for MEMS applications, Eurosensors XIV Conference, September 15-18, Prague, Czech Republic, 2002, pp. 103-104. At Eurosensors XIV Conference, Prague, Czech Republic, 15 - 18 Sep 2002. , 95-98.
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| Item Type: | Conference or Workshop Item (Poster) |
|---|---|
| Additional Information: | Event Dates: September 15-18 |
| Divisions: | Faculty of Physical and Applied Science > Electronics and Computer Science > NANO Faculty of Physical and Applied Science > Electronics and Computer Science > EEE |
| Item ID: | 271826 |
| Date Deposited: | 22 Dec 2010 11:24 |
| Last Modified: | 01 Mar 2012 12:06 |
| Contributors: | Kukharenka,, E (Author) Kraft, M (Author) |
| Date: | 6 September 2002 |
| Additional Information: | Event Dates: September 15-18 |
| Status: | Published |
| Further Information: | Google Scholar |
| URI: | http://eprints.soton.ac.uk/id/eprint/271826 |
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