Realisation of electroplating moulds with different thick photoresists for MEMS applications


Kukharenka, E. and Kraft, M. (2002) Realisation of electroplating moulds with different thick photoresists for MEMS applications. At Eurosensors XIV Conference, Prague, Czech Republic, 15 - 18 Sep 2002. , 95-98.

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Item Type: Conference or Workshop Item (Poster)
Additional Information: Event Dates: September 15-18
Divisions: Faculty of Physical Sciences and Engineering > Electronics and Computer Science > EEE
Faculty of Physical Sciences and Engineering > Electronics and Computer Science > NANO
ePrint ID: 271826
Date Deposited: 22 Dec 2010 11:24
Last Modified: 29 Dec 2015 22:14
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/271826

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