Fabrication of Silicon-based single spin quantum devices using Hydrogen silsesquioxane electron beam resist
Husain, Muhammad, Lin, Yun, Alkhalil, Feras, Chong, Harold, Tsuchiya, Yoshishige, Lambert, Nicholas, Ferguson, Andrew and Mizuta, Hiroshi (2011) Fabrication of Silicon-based single spin quantum devices using Hydrogen silsesquioxane electron beam resist. At The 37th International Conference on Micro and Nano Engineering, Berlin, Germany, 19 - 23 Sep 2011.
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| Item Type: | Conference or Workshop Item (Speech) |
|---|---|
| Additional Information: | Event Dates: September 19-23, 2011 |
| Divisions: | Faculty of Physical and Applied Science > Electronics and Computer Science > NANO |
| Item ID: | 272665 |
| Date Deposited: | 14 Aug 2011 11:35 |
| Last Modified: | 02 Mar 2012 13:43 |
| Contributors: | Husain, Muhammad (Author) Lin, Yun (Author) Alkhalil, Feras (Author) Chong, Harold (Author) Tsuchiya, Yoshishige (Author) Lambert, Nicholas (Author) Ferguson, Andrew (Author) Mizuta, Hiroshi (Author) |
| Date: | 19 September 2011 |
| Additional Information: | Event Dates: September 19-23, 2011 |
| Status: | Published |
| Further Information: | Google Scholar |
| URI: | http://eprints.soton.ac.uk/id/eprint/272665 |
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