High speed silicon optical modulator with self aligned fabrication process
Thomson, D. J., Gardes, F. Y., Reed, G. T., Milesi, F. and Fedeli, J-M (2010) High speed silicon optical modulator with self aligned fabrication process. Optics Express, 18, (18), 19064-19069. (doi:10.1364/OE.18.019064).
Download
Full text not available from this repository.
Description/Abstract
With the imminent commercialisation of silicon photonic devices comes the requirement for a fabrication process capable of high yield and device performance repeatability. The precise alignment of the different elements of a device can be a major fabrication challenge for minimising performance variation or even device failure. In this paper a new design of high speed carrier depletion silicon optical modulator is introduced which features the use of a self-aligned fabrication process to form the pn junction. Experimental results are presented from an initial fabrication run, which has demonstrated a 6dB modulation depth at 10Gbit/s from a 3.5mm long device.
| Item Type: | Article |
|---|---|
| ISSNs: | 1094-4087 (print) |
| Related URLs: | |
| Subjects: | Q Science > QC Physics T Technology > TK Electrical engineering. Electronics Nuclear engineering |
| Divisions: | Faculty of Physical and Applied Science > Electronics and Computer Science > NANO |
| Item ID: | 337743 |
| Date Deposited: | 03 May 2012 13:53 |
| Last Modified: | 26 Apr 2013 05:49 |
| Contributors: | Thomson, D. J. (Author) Gardes, F. Y. (Author) Reed, G. T. (Author) Milesi, F. (Author) Fedeli, J-M (Author) |
| Date: | 23 August 2010 |
| Status: | Published |
| Further Information: | Google Scholar |
| ISI Citation Count: | 16 |
| URI: | http://eprints.soton.ac.uk/id/eprint/337743 |
Actions (login required)
 |
View Item |
