A novel fabrication process for capacitive cantilever structures for smart fabric applications

Wei, Yang, Torah, Russel, Yang, Kai, Beeby, Steve and Tudor, John (2012) A novel fabrication process for capacitive cantilever structures for smart fabric applications. In, Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS 2012, Cannes, FR, 25 - 27 Apr 2012. 4pp, 136-139.


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This paper reports, for the first time, capacitive freestanding cantilever beams fabricated by screen printing sacrificial and structural materials onto a fabric/textile. Unlike traditional weaving process, the device will be screen printed layer by layer with desired pattern onto the fabric substrate. Free standing structures will be fabricated directly onto fabrics rather than other methods such as bonding or embedding. In addition, a low temperature removable sacrificial material capable for the removal conditions on fabrics will also be reported.

Item Type: Conference or Workshop Item (Paper)
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Subjects: T Technology > TS Manufactures
T Technology > TK Electrical engineering. Electronics Nuclear engineering
Divisions : Faculty of Physical Sciences and Engineering > Electronics and Computer Science > EEE
ePrint ID: 340270
Accepted Date and Publication Date:
25 April 2012Delivered
25 April 2012Made publicly available
Date Deposited: 18 Jun 2012 13:03
Last Modified: 31 Mar 2016 14:29
Micro fabrication production technology for MEMS on new emerging smart textiles/flexibles (MICROFLEX)
Funded by: European Commission - FP7 (211335)
1 November 2008 to 31 October 2012
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/340270

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