Photonic microcantilevers with interferometric Bragg grating interrogation

Carpenter, Lewis G., Holmes, Christopher, Snow, Benjamin D., Gates, James C. and Smith, Peter G.R. (2012) Photonic microcantilevers with interferometric Bragg grating interrogation. IEEE Photonics Journal, 4, (5), 1387-1395. (doi:10.1109/JPHOT.2012.2210396).


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Germanosilicate glass microcantilevers are fabricated featuring an integrated Fabry-Pérot interferometer. Direct UV writing of single-mode planar waveguides and Bragg gratings is combined with physical micromachining, using a precision dicing saw, to realize glass microcantilevers on a silicon platform. The device presented here has a wavelength shift force sensitivity of 330 nm/N, which is calibrated using a surface profilometer measurement and is an order of magnitude better than current state-of-the-art Bragg-grating-based sensors. The device also shows an approximately tenfold increase in amplitude modulation compared with a similar device architecture utilizing a single Gaussian-apodized Bragg grating. By forming the Fabry-Pérot cavity around the point of greatest strain, we reduce the unwanted effects of grating chirp as the cantilever is deflected and relate the performance to a mechanical model that relates cavity phase shift to deflection.

Item Type: Article
Digital Object Identifier (DOI): doi:10.1109/JPHOT.2012.2210396
ISSNs: 1943-0655 (print)
1943-0655 (electronic)
Related URLs:
Subjects: Q Science > QD Chemistry
Divisions : Faculty of Physical Sciences and Engineering > Optoelectronics Research Centre
Faculty of Physical Sciences and Engineering > Electronics and Computer Science
ePrint ID: 342402
Accepted Date and Publication Date:
October 2012Published
Date Deposited: 29 Aug 2012 10:45
Last Modified: 31 Mar 2016 14:33
Further Information:Google Scholar

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