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A novel low cost spring-less RF MEMS switch prototype

A novel low cost spring-less RF MEMS switch prototype
A novel low cost spring-less RF MEMS switch prototype
This work reports on the fabrication process and measurements of a novel radio frequency microelectromechanical system (RF MEMS) capacitive shunt switch prototype with a mechanically unconstrained armature. The prototype is fabricated in a low cost process based on a printed circuit board (PCB) bonded to a glass slide. The minimum actuation voltage (Vact) of the prototype is 93 V, with a switching time taken from the down to up state (Trise) and from the up to down state (Tfall) of 105 ms and 26 ms respectively.
PCB MEMS, low cost, electrostatic actuation
1462-1465
Kiang, K.S.
fdb609c6-75aa-4893-85c8-8e50edfda7fe
Chong, H.M.H.
795aa67f-29e5-480f-b1bc-9bd5c0d558e1
Kraft, M.
54927621-738f-4d40-af56-a027f686b59f
Kiang, K.S.
fdb609c6-75aa-4893-85c8-8e50edfda7fe
Chong, H.M.H.
795aa67f-29e5-480f-b1bc-9bd5c0d558e1
Kraft, M.
54927621-738f-4d40-af56-a027f686b59f

Kiang, K.S., Chong, H.M.H. and Kraft, M. (2010) A novel low cost spring-less RF MEMS switch prototype. [in special issue: Eurosensor XXIV Conference] Procedia Engineering, 5, 1462-1465. (doi:10.1016/j.proeng.2010.09.392).

Record type: Article

Abstract

This work reports on the fabrication process and measurements of a novel radio frequency microelectromechanical system (RF MEMS) capacitive shunt switch prototype with a mechanically unconstrained armature. The prototype is fabricated in a low cost process based on a printed circuit board (PCB) bonded to a glass slide. The minimum actuation voltage (Vact) of the prototype is 93 V, with a switching time taken from the down to up state (Trise) and from the up to down state (Tfall) of 105 ms and 26 ms respectively.

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1-s2.0-S1877705810009392-main.pdf__tid=2d3285da-5b72-11e4-a3e5-00000aacb35e&acdnat=1414150847_86280422716c95416c6531993a599aa1 - Version of Record
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Published date: 2010
Keywords: PCB MEMS, low cost, electrostatic actuation
Organisations: Electronics & Computer Science
Learn more about Electronics & Computer Science research

Identifiers

Local EPrints ID: 370455
URI: http://eprints.soton.ac.uk/id/eprint/370455
DOI: doi:10.1016/j.proeng.2010.09.392
PURE UUID: 2fc15240-2e02-4596-9940-d482b77a1635
ORCID for K.S. Kiang: ORCID iD orcid.org/0000-0002-7326-909X
ORCID for H.M.H. Chong: ORCID iD orcid.org/0000-0002-7110-5761

Catalogue record

Date deposited: 24 Oct 2014 11:42
Last modified: 15 Mar 2024 03:30

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Contributors

Author: K.S. Kiang ORCID iD
Author: H.M.H. Chong ORCID iD
Author: M. Kraft

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