Design and fabrication of suspended indium phosphide waveguides for MEMS-actuated optical buffering
Design and fabrication of suspended indium phosphide waveguides for MEMS-actuated optical buffering
We present the design and fabrication of suspended optical waveguides on indium phosphide (InP) platform for use in an optical buffer device with MEMS actuation, in which the optical delay can be achieved by changing the spacing of the waveguides by electrostatic actuation. The optical and mechanical properties of the waveguides and pillar supports are modeled, and different MEMS actuation schemes are simulated. We also present fabrication and characterization results of the epitaxially grown sample structure and of the suspended waveguide device, exhibiting two parallel waveguides with submicron dimensions separated by a 400 nm air gap, and suspended at 40 µm intervals by S-shaped supports.
1-7
Ng, Wing H.
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Podoliak, Nina
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Horak, Peter
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Wu, Jiang
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Liu, Huiyun
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Stewart, William J.
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Kenyon, Anthony J.
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2015
Ng, Wing H.
0cae4e04-109c-48ea-96d2-1600f0710b66
Podoliak, Nina
0908b951-00a7-48a5-bc82-631640910b9c
Horak, Peter
520489b5-ccc7-4d29-bb30-c1e36436ea03
Wu, Jiang
3102d4d7-4bf1-43a6-ac40-acbf798360b6
Liu, Huiyun
ed01636f-0728-4d76-87ee-08b93635b2aa
Stewart, William J.
bbe93aab-9477-4f08-9042-a0c453aeb7a5
Kenyon, Anthony J.
1e816a53-7f8f-4a52-b140-46d7431c64af
Ng, Wing H., Podoliak, Nina, Horak, Peter, Wu, Jiang, Liu, Huiyun, Stewart, William J. and Kenyon, Anthony J.
(2015)
Design and fabrication of suspended indium phosphide waveguides for MEMS-actuated optical buffering.
IEEE Journal of Selected Topics in Quantum Electronics, 21 (4), .
(doi:10.1109/JSTQE.2014.2384514).
Abstract
We present the design and fabrication of suspended optical waveguides on indium phosphide (InP) platform for use in an optical buffer device with MEMS actuation, in which the optical delay can be achieved by changing the spacing of the waveguides by electrostatic actuation. The optical and mechanical properties of the waveguides and pillar supports are modeled, and different MEMS actuation schemes are simulated. We also present fabrication and characterization results of the epitaxially grown sample structure and of the suspended waveguide device, exhibiting two parallel waveguides with submicron dimensions separated by a 400 nm air gap, and suspended at 40 µm intervals by S-shaped supports.
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Accepted/In Press date: 14 December 2014
e-pub ahead of print date: 19 December 2014
Published date: 2015
Organisations:
Optoelectronics Research Centre, Quantum, Light & Matter Group
Identifiers
Local EPrints ID: 374652
URI: http://eprints.soton.ac.uk/id/eprint/374652
ISSN: 1077-260X
PURE UUID: 656b5308-85f0-4e87-aac8-f6f49ee3406b
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Date deposited: 25 Feb 2015 15:07
Last modified: 15 Mar 2024 03:36
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Contributors
Author:
Wing H. Ng
Author:
Nina Podoliak
Author:
Jiang Wu
Author:
Huiyun Liu
Author:
William J. Stewart
Author:
Anthony J. Kenyon
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