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Design and fabrication of indium phosphide air-bridge waveguides with MEMS functionality

Design and fabrication of indium phosphide air-bridge waveguides with MEMS functionality
Design and fabrication of indium phosphide air-bridge waveguides with MEMS functionality
Data used in publication: Wing H. Ng, Nina Podoliak, Peter Horak, Jiang Wu, Huiyun Liu, William J. Stewart, and Anthony J. Kenyon, "Design and fabrication of indium phosphide air-bridge waveguides with MEMS functionality" Submitted to SPIE Microtechnologies conference, 4-6 May 2015, Barcelona, Spain
University of Southampton
Ng, Wing H.
0cae4e04-109c-48ea-96d2-1600f0710b66
Podoliak, Nina
0908b951-00a7-48a5-bc82-631640910b9c
Horak, Peter
520489b5-ccc7-4d29-bb30-c1e36436ea03
Wu, Jiang
3102d4d7-4bf1-43a6-ac40-acbf798360b6
Liu, Huiyun
ed01636f-0728-4d76-87ee-08b93635b2aa
Stewart, Will
bbe93aab-9477-4f08-9042-a0c453aeb7a5
Kenyon, Anthony J.
1e816a53-7f8f-4a52-b140-46d7431c64af
Ng, Wing H.
0cae4e04-109c-48ea-96d2-1600f0710b66
Podoliak, Nina
0908b951-00a7-48a5-bc82-631640910b9c
Horak, Peter
520489b5-ccc7-4d29-bb30-c1e36436ea03
Wu, Jiang
3102d4d7-4bf1-43a6-ac40-acbf798360b6
Liu, Huiyun
ed01636f-0728-4d76-87ee-08b93635b2aa
Stewart, Will
bbe93aab-9477-4f08-9042-a0c453aeb7a5
Kenyon, Anthony J.
1e816a53-7f8f-4a52-b140-46d7431c64af

Ng, Wing H., Podoliak, Nina, Horak, Peter, Wu, Jiang, Liu, Huiyun, Stewart, Will and Kenyon, Anthony J. (2015) Design and fabrication of indium phosphide air-bridge waveguides with MEMS functionality. University of Southampton doi:10.5258/SOTON/375764 [Dataset]

Record type: Dataset

Abstract

Data used in publication: Wing H. Ng, Nina Podoliak, Peter Horak, Jiang Wu, Huiyun Liu, William J. Stewart, and Anthony J. Kenyon, "Design and fabrication of indium phosphide air-bridge waveguides with MEMS functionality" Submitted to SPIE Microtechnologies conference, 4-6 May 2015, Barcelona, Spain

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More information

Published date: 2015
Organisations: Optoelectronics Research Centre

Identifiers

Local EPrints ID: 375764
URI: http://eprints.soton.ac.uk/id/eprint/375764
PURE UUID: bb141563-d46b-4d4d-8c74-559e35c2058c
ORCID for Nina Podoliak: ORCID iD orcid.org/0000-0002-3146-0355
ORCID for Peter Horak: ORCID iD orcid.org/0000-0002-8710-8764

Catalogue record

Date deposited: 13 Apr 2015 11:25
Last modified: 27 Feb 2024 02:47

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Contributors

Creator: Wing H. Ng
Creator: Nina Podoliak ORCID iD
Creator: Peter Horak ORCID iD
Creator: Jiang Wu
Creator: Huiyun Liu
Creator: Will Stewart
Creator: Anthony J. Kenyon

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