X-ray photoelectron spectroscopy studies of the effects of plasma etching on amorphous carbon nitride films
Jiang, Liudi, Fitzgerald, A.G., Rose, M.J., Cheung, R., Rong, B. and van de Drift, E. (2002) X-ray photoelectron spectroscopy studies of the effects of plasma etching on amorphous carbon nitride films. Applied Surface Science, 193, (1-4), 144-148. (doi:10.1016/S0169-4332(02)00225-8).
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Description/Abstract
The effects of post-treated oxygen plasma etching procedures have been investigated for amorphous carbon nitride (a-C:N) films deposited by dc magnetron sputtering. X-ray photoelectron spectroscopy (XPS) has been used to study the microstructure of these films. It has been found that the relative concentration of the beta-C3N4-like phase in the a-C:N films is enhanced significantly by oxygen plasma etching and by increasing the dc bias voltages during the etch experiments. This study reveals that an oxygen plasma can work as an effective chemical etchant for the graphite-like carbon-nitrogen phase in a-C:N films. This suggests a very promising way of obtaining harder a-C:N films.
| Item Type: | Article |
|---|---|
| ISSNs: | 0169-4332 (print) |
| Related URLs: | |
| Keywords: | carbon nitride, plasma etching, XPS |
| Subjects: | Q Science > QD Chemistry Q Science > QC Physics |
| Divisions: | University Structure - Pre August 2011 > School of Engineering Sciences > Engineering Materials & Surface Engineering |
| Item ID: | 37635 |
| Date Deposited: | 24 May 2006 |
| Last Modified: | 01 Jun 2011 06:42 |
| Contributors: | Jiang, Liudi (Author) Fitzgerald, A.G. (Author) Rose, M.J. (Author) Cheung, R. (Author) Rong, B. (Author) van de Drift, E. (Author) |
| Date: | June 2002 |
| Status: | Published |
| Contact Email Address: | ldjiang@soton.ac.uk |
| URI: | http://eprints.soton.ac.uk/id/eprint/37635 |
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