Characterisation of cubic boron nitride films at different stages of deposition
Jiang, Liudi, Fitzgerald, A.G., Rose, M.J., Lousa, A. and Gimeno, S. (2000) Characterisation of cubic boron nitride films at different stages of deposition. Applied Surface Science, 167, (1-2), 89-93. (doi:10.1016/S0169-4332(00)00514-6).
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Cubic boron nitride (c-BN) films have been prepared by tuned substrate RF magnetron sputtering with different deposition times. The films have been characterised by Fourier Transform Infrared Absorption (FTIR) spectroscopy, X-ray Photoelectron Spectroscopy (XPS) and by Atomic Force Microscopy (AFM) measurements. The results show changes in composition and microstructure of the films with different deposition times that correspond to different growth stages of the BN films. By analysing the AFM images, we believe the BN layer formed at the early stages of deposition have a hillock morphology.
|Keywords:||cubic boron nitride, magnetron sputtering, AFM images|
|Subjects:||Q Science > Q Science (General)|
|Divisions:||University Structure - Pre August 2011 > School of Engineering Sciences > Engineering Materials & Surface Engineering
|Date Deposited:||26 May 2006|
|Last Modified:||27 Mar 2014 18:24|
|RDF:||RDF+N-Triples, RDF+N3, RDF+XML, Browse.|
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