Characterisation of cubic boron nitride films at different stages of deposition

Jiang, Liudi, Fitzgerald, A.G., Rose, M.J., Lousa, A. and Gimeno, S. (2000) Characterisation of cubic boron nitride films at different stages of deposition. Applied Surface Science, 167, (1-2), 89-93. (doi:10.1016/S0169-4332(00)00514-6).


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Cubic boron nitride (c-BN) films have been prepared by tuned substrate RF magnetron sputtering with different deposition times. The films have been characterised by Fourier Transform Infrared Absorption (FTIR) spectroscopy, X-ray Photoelectron Spectroscopy (XPS) and by Atomic Force Microscopy (AFM) measurements. The results show changes in composition and microstructure of the films with different deposition times that correspond to different growth stages of the BN films. By analysing the AFM images, we believe the BN layer formed at the early stages of deposition have a hillock morphology.

Item Type: Article
Digital Object Identifier (DOI): doi:10.1016/S0169-4332(00)00514-6
Related URLs:
Keywords: cubic boron nitride, magnetron sputtering, AFM images
Subjects: Q Science > Q Science (General)
Divisions : University Structure - Pre August 2011 > School of Engineering Sciences > Engineering Materials & Surface Engineering
ePrint ID: 37945
Accepted Date and Publication Date:
October 2000Published
Date Deposited: 26 May 2006
Last Modified: 31 Mar 2016 12:07

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