The University of Southampton
University of Southampton Institutional Repository

Investigating vibration dynamics of cross-coupled MEMS resonators for reduced motional resistance

Investigating vibration dynamics of cross-coupled MEMS resonators for reduced motional resistance
Investigating vibration dynamics of cross-coupled MEMS resonators for reduced motional resistance
This paper investigates the vibration dynamics of a closed-chain, cross-coupled architecture of MEMS resonators. The system presented here is electrostatically transduced and operates at 1.04 MHz. Curve veering of the eigenvalue loci is used to experimentally quantify the coupling spring constants. Numerical simulations of the motional resistance variation against induced perturbation are used to assess the robustness of the cross-coupled system as opposed to equivalent traditional open-ended linear one-dimensional coupling scheme. Results show improvements of as much as 32% in the motional resistance between the cross-coupled system and its one-dimensional counterpart.
1711-1714
IEEE
Erbes, Andreja
587e97f9-78e6-41bf-aa92-dca0ecb9de99
Thiruvenkatanathan, Pradyumna
42613b52-d83d-4fa9-bc40-337201dfa2a0
Yan, Jize
786dc090-843b-435d-adbe-1d35e8fc5828
Seshia, A Ashwin
674d2acc-6942-432d-9f32-e0d8fffcd36e
Erbes, Andreja
587e97f9-78e6-41bf-aa92-dca0ecb9de99
Thiruvenkatanathan, Pradyumna
42613b52-d83d-4fa9-bc40-337201dfa2a0
Yan, Jize
786dc090-843b-435d-adbe-1d35e8fc5828
Seshia, A Ashwin
674d2acc-6942-432d-9f32-e0d8fffcd36e

Erbes, Andreja, Thiruvenkatanathan, Pradyumna, Yan, Jize and Seshia, A Ashwin (2013) Investigating vibration dynamics of cross-coupled MEMS resonators for reduced motional resistance. In 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII). IEEE. pp. 1711-1714 . (doi:10.1109/Transducers.2013.6627116).

Record type: Conference or Workshop Item (Paper)

Abstract

This paper investigates the vibration dynamics of a closed-chain, cross-coupled architecture of MEMS resonators. The system presented here is electrostatically transduced and operates at 1.04 MHz. Curve veering of the eigenvalue loci is used to experimentally quantify the coupling spring constants. Numerical simulations of the motional resistance variation against induced perturbation are used to assess the robustness of the cross-coupled system as opposed to equivalent traditional open-ended linear one-dimensional coupling scheme. Results show improvements of as much as 32% in the motional resistance between the cross-coupled system and its one-dimensional counterpart.

Text
[51] Transducers 2013 Andrej.pdf - Other
Restricted to Repository staff only
Request a copy

More information

e-pub ahead of print date: 2013
Venue - Dates: 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers & Eurosensors XXVII), Barcelona, Spain, 2013-06-16 - 2013-06-20
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 398790
URI: http://eprints.soton.ac.uk/id/eprint/398790
PURE UUID: 88dbadfe-21ad-44d6-bf0c-d14fe6c21a1e
ORCID for Jize Yan: ORCID iD orcid.org/0000-0002-2886-2847

Catalogue record

Date deposited: 02 Aug 2016 11:57
Last modified: 16 Mar 2024 04:23

Export record

Altmetrics

Contributors

Author: Andreja Erbes
Author: Pradyumna Thiruvenkatanathan
Author: Jize Yan ORCID iD
Author: A Ashwin Seshia

Download statistics

Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.

View more statistics

Atom RSS 1.0 RSS 2.0

Contact ePrints Soton: eprints@soton.ac.uk

ePrints Soton supports OAI 2.0 with a base URL of http://eprints.soton.ac.uk/cgi/oai2

This repository has been built using EPrints software, developed at the University of Southampton, but available to everyone to use.

We use cookies to ensure that we give you the best experience on our website. If you continue without changing your settings, we will assume that you are happy to receive cookies on the University of Southampton website.

×