Voltage programmable dual-band bandpass/bandstop filter response in a single micro-electro-mechanical device

Zou, Xudong, Yan, Jize and Seshia, A Ashwin (2011) Voltage programmable dual-band bandpass/bandstop filter response in a single micro-electro-mechanical device. 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, Beijing Shi, China. 05 - 09 Jun 2011. pp. 836-839 . (doi:10.1109/TRANSDUCERS.2011.5969694).

Record type: Conference or Workshop Item (Paper)

Abstract

This paper reports on a switchable multi-band filter response achieved within a single micro-electro-mechanical device. A prototype device fabricated in a SOI process demonstrates a voltage programmable and tunable, dual-band, band-pass/band-stop response. Both analytical and finite element models are introduced in this paper to elucidate the operating principle of the filter and to guide filter design. Voltage programmability of the filter characteristic is demonstrated with the ability to independently tune the centre frequency and bandwidth for each band. A representative measurement shows that the minimum 3 dB-bandwidth (BW) is 155 Hz, 140Hz, and 20 dB-BW is 216 Hz, 203Hz for the upper-band and lower-band center frequencies located at 131.5 kHz and 130.7 kHz, respectively.

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