Enhancing parametric sensitivity in electrically coupled MEMS resonators

Thiruvenkatanathan, Pradyumna, Yan, Jize, Lee, Joshua and Seshia, A Ashwin (2009) Enhancing parametric sensitivity in electrically coupled MEMS resonators. Transducers 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference, Denver, United States. 21 - 25 Jun 2009. pp. 2350-2353 . (doi:10.1109/SENSOR.2009.5285444).

Record type: Conference or Workshop Item (Paper)

Abstract

We use vibration localization as a sensitive means of detecting small perturbations in stiffness in a pair of weakly coupled micromechanical resonators. For the first time, the variation in the eigenstates is studied by electrostatically coupling nearly identical resonators to allow for stronger localization of vibrational energy due to perturbations in stiffness. Eigenstate variations that are orders of magnitude greater than corresponding shifts in resonant frequency for an induced stiffness perturbation are experimentally demonstrated. Such high, voltage-tunable parametric sensitivities together with the added advantage of intrinsic common mode rejection pave the way to a new paradigm of mechanical sensing.

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e-pub ahead of print date: 2009

Venue - Dates: Transducers 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference, Denver, United States, 2009-06-21 - 2009-06-25

Organisations: Nanoelectronics and Nanotechnology