Electrically coupled MEMS oscillators

Agrawal, Deepak, Thiruvenkatanathan, Pradyumna, Yan, Jize and Seshia, A. Ashwin (2011) Electrically coupled MEMS oscillators. 2011 Joint Conference of the IEEE International Frequency Control and the European Frequency and Time Forum (FCS), San Francisco, United States. 02 - 05 May 2011. 5 pp . (doi:10.1109/FCS.2011.5977776).

Record type: Conference or Workshop Item (Paper)

Abstract

In this paper, we demonstrate synchronization of two electrically coupled MEMS oscillators incorporating nearly identical silicon tuning fork microresonators. It is seen that as the output of the oscillators are coupled, they exhibit a synchronized response wherein the output amplitudes and signal-to-noise ratios of the two oscillators are improved relative to the case where the two oscillators are uncoupled. The observed output frequency of each oscillator before coupling is 219402.4 Hz and 219403.6 Hz respectively. In contrast, when the oscillators are driven simultaneously, they lock at a common output frequency of 219401.3 Hz and their outputs are found to be out-of-phase with respect to each other. A 6 dBm gain in output power and a reduction in the phase fluctuations of the output signal are observed for the coupled oscillators compared to the case when the oscillators are uncoupled.

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e-pub ahead of print date: May 2011

Venue - Dates: 2011 Joint Conference of the IEEE International Frequency Control and the European Frequency and Time Forum (FCS), San Francisco, United States, 2011-05-02 - 2011-05-05

Organisations: Nanoelectronics and Nanotechnology