Internal phase inversion narrow bandwidth MEMS filter
Internal phase inversion narrow bandwidth MEMS filter
This paper reports a novel capacitively coupled twin beam resonator internal phase inversion filter fabricated in a SOI MEMS process. A narrow bandwidth of 0.0157% is demonstrated with a low control-voltage of -0.87 V. The bandwidth can be substantially reduced by utilizing an electrical coupling spring as opposed to a mechanical coupling-spring. The bandwidth is tunable with control achieved using a differential DC bias. A summary and comparison with other members of the phase inversion filter family is also included.
705-708
Yan, Jize
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Seshia, A Ashwin
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Phan, Kim Le
69409db6-3c28-4e5b-a799-a44f4566298b
van Beek, Joost T-M
e98bccf5-feea-47aa-9854-ebc3db451da3
Yan, Jize
786dc090-843b-435d-adbe-1d35e8fc5828
Seshia, A Ashwin
674d2acc-6942-432d-9f32-e0d8fffcd36e
Phan, Kim Le
69409db6-3c28-4e5b-a799-a44f4566298b
van Beek, Joost T-M
e98bccf5-feea-47aa-9854-ebc3db451da3
Yan, Jize, Seshia, A Ashwin, Phan, Kim Le and van Beek, Joost T-M
(2008)
Internal phase inversion narrow bandwidth MEMS filter.
2008 IEEE Ultrasonics Symposium.
02 - 05 Nov 2008.
.
(doi:10.1109/ULTSYM.2008.0168).
Record type:
Conference or Workshop Item
(Paper)
Abstract
This paper reports a novel capacitively coupled twin beam resonator internal phase inversion filter fabricated in a SOI MEMS process. A narrow bandwidth of 0.0157% is demonstrated with a low control-voltage of -0.87 V. The bandwidth can be substantially reduced by utilizing an electrical coupling spring as opposed to a mechanical coupling-spring. The bandwidth is tunable with control achieved using a differential DC bias. A summary and comparison with other members of the phase inversion filter family is also included.
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[11] IUS 08 Yan.pdf
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e-pub ahead of print date: 2008
Venue - Dates:
2008 IEEE Ultrasonics Symposium, 2008-11-02 - 2008-11-05
Organisations:
Nanoelectronics and Nanotechnology
Identifiers
Local EPrints ID: 398829
URI: http://eprints.soton.ac.uk/id/eprint/398829
PURE UUID: ede98ed7-8fc2-4550-adfc-7137b140b7e9
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Date deposited: 03 Aug 2016 11:10
Last modified: 15 Mar 2024 03:53
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Contributors
Author:
A Ashwin Seshia
Author:
Kim Le Phan
Author:
Joost T-M van Beek
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