Laser annealing of low temperature deposited silicon waveguides
Laser annealing of low temperature deposited silicon waveguides
We report the fabrication of low temperature deposited polysilicon waveguides using a laser annealing process. Micro-Raman and XRD measurements reveal the quasi-single crystal-like quality of the material, which exhibits low optical losses of 5.13 dB/cm.
Optical Society of America
Franz, Yohann
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Runge, Antoine
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Oo, Swe
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Healy, Noel
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Martinez Jimenez, Gregorio
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Khokhar, Ali
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Tarazona, Antulio
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Chong, Harold
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Mailis, Sakellaris
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Peacock, Anna
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May 2017
Franz, Yohann
edb6208c-9f65-42c4-965e-b6bc54945602
Runge, Antoine
874cec37-209b-4c7a-97a5-56d05596dd2b
Oo, Swe
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Healy, Noel
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Martinez Jimenez, Gregorio
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Khokhar, Ali
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Tarazona, Antulio
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Chong, Harold
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Mailis, Sakellaris
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Peacock, Anna
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Franz, Yohann, Runge, Antoine, Oo, Swe, Healy, Noel, Martinez Jimenez, Gregorio, Khokhar, Ali, Tarazona, Antulio, Chong, Harold, Mailis, Sakellaris and Peacock, Anna
(2017)
Laser annealing of low temperature deposited silicon waveguides.
In Conference on lasers and electro-optics.
Optical Society of America.
2 pp
.
(doi:10.1364/CLEO_SI.2017.SM3K.4).
Record type:
Conference or Workshop Item
(Paper)
Abstract
We report the fabrication of low temperature deposited polysilicon waveguides using a laser annealing process. Micro-Raman and XRD measurements reveal the quasi-single crystal-like quality of the material, which exhibits low optical losses of 5.13 dB/cm.
Text
Yohann_Franz_CLEO-US_2017
- Accepted Manuscript
More information
Accepted/In Press date: 2 March 2017
e-pub ahead of print date: 19 May 2017
Published date: May 2017
Venue - Dates:
CLEO: Science and Innovations 2017, , San Jose, United States, 2017-05-14 - 2017-05-19
Organisations:
Optoelectronics Research Centre, Nanoelectronics and Nanotechnology
Identifiers
Local EPrints ID: 406211
URI: http://eprints.soton.ac.uk/id/eprint/406211
PURE UUID: ca6f5cc6-3391-430a-b3fc-2815206c7395
Catalogue record
Date deposited: 10 Mar 2017 10:42
Last modified: 16 Mar 2024 05:05
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Contributors
Author:
Yohann Franz
Author:
Antoine Runge
Author:
Swe Oo
Author:
Noel Healy
Author:
Gregorio Martinez Jimenez
Author:
Ali Khokhar
Author:
Antulio Tarazona
Author:
Harold Chong
Author:
Sakellaris Mailis
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