Sun, Wenjuan, McBride, John W. and Hill, Martyn
The application of 3D optical scanning systems for the measurement of spherical and aspheric surfaces.
In, American Society for Precision Enginnering (ASPE 2006), Monterey, USA,
American Society for Precision Engineering.
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Optical scanning systems are widely used for precision surface measurements because they offer increased scanning speeds over stylus systems and are also non-contact measurements. The 3D optical scanning system is one type of optical scanning machine, which combines three-axis control with an optical displacement sensor in the Z axis. This type of system is widely used in precision surface measurements, and shows the potential for the 3D measurement of both spherical and aspheric surfaces.
In this paper, the systematic errors of a con-focal the white light (WL) measurement system are studied, with a view to improve the performance for the measurement of spherical and aspheric surfaces. The dominant systematic errors include, positioning error, table flatness and sensor error related to surface slope. Three stages of experiments are presented identify these systematic errors. They are single line scans, optical flat measurements and calibration ball measurements. At the end of the paper, the complex circumstance, where more than one systematic error overlapped each other has been discussed. Computer simulation process also has been used to assist the identification of the systematic errors, and these are applied to the measurement of a spherical reference surface.
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