Modelling and fabrication of low operation temperature microcages with a polymer/metal/DLC trilayer structure
Luo, J.K., Huang, R., He, J.H., Fu, Y.Q., Flewitt, A.J., Spearing, S.M., Fleck, N.A. and Milne, W.I. (2006) Modelling and fabrication of low operation temperature microcages with a polymer/metal/DLC trilayer structure. Sensors and Actuators A: Physical, 132, (1), 346-353. (doi:10.1016/j.sna.2006.03.004).
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Description/Abstract
Multi-finger microcages with metal/diamond like carbon (DLC) bilayer and polymer/metal/DLC trilayer structures were analyzed, simulated and fabricated. Modelling by finite element analysis showed that a soft polymer can be used together with DLC to form a normally closed microcage which can be opened by 90 degrees angle at a temperature of similar to 400 K, which is much lower than that of a metal/DLC bilayer structure previously demonstrated. The opening temperature for a microcage is independent of the finger dimensions, but is simply determined by the thermal expansion coefficient difference of two materials used. Microcages with SU8/DLC bilayer and SU8/Al/DLC trilayer structures have been fabricated and fully closed microcages with diameters of similar to 40 mu m have been obtained. Initial electrical tests have showed these devices open by more than 90 degrees at a temperature lower than 150 degrees C, roughly in agreement with the theoretical analysis.
| Item Type: | Article |
|---|---|
| ISSNs: | 0924-4247 (print) |
| Related URLs: | |
| Subjects: | T Technology > TJ Mechanical engineering and machinery |
| Divisions: | University Structure - Pre August 2011 > School of Engineering Sciences > Engineering Materials & Surface Engineering |
| Item ID: | 42963 |
| Date Deposited: | 05 Jan 2007 |
| Last Modified: | 01 Jun 2011 02:18 |
| Contributors: | Luo, J.K. (Author) Huang, R. (Author) He, J.H. (Author) Fu, Y.Q. (Author) Flewitt, A.J. (Author) Spearing, S.M. (Author) Fleck, N.A. (Author) Milne, W.I. (Author) |
| Date: | November 2006 |
| Status: | Published |
| Contact Email Address: | spearing@soton.ac.uk |
| URI: | http://eprints.soton.ac.uk/id/eprint/42963 |
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