Modelling and fabrication of low operation temperature microcages with a polymer/metal/DLC trilayer structure


Luo, J.K., Huang, R., He, J.H., Fu, Y.Q., Flewitt, A.J., Spearing, S.M., Fleck, N.A. and Milne, W.I. (2006) Modelling and fabrication of low operation temperature microcages with a polymer/metal/DLC trilayer structure. Sensors and Actuators A: Physical, 132, (1), 346-353. (doi:10.1016/j.sna.2006.03.004).

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Description/Abstract

Multi-finger microcages with metal/diamond like carbon (DLC) bilayer and polymer/metal/DLC trilayer structures were analyzed, simulated and fabricated. Modelling by finite element analysis showed that a soft polymer can be used together with DLC to form a normally closed microcage which can be opened by 90 degrees angle at a temperature of similar to 400 K, which is much lower than that of a metal/DLC bilayer structure previously demonstrated. The opening temperature for a microcage is independent of the finger dimensions, but is simply determined by the thermal expansion coefficient difference of two materials used. Microcages with SU8/DLC bilayer and SU8/Al/DLC trilayer structures have been fabricated and fully closed microcages with diameters of similar to 40 mu m have been obtained. Initial electrical tests have showed these devices open by more than 90 degrees at a temperature lower than 150 degrees C, roughly in agreement with the theoretical analysis.

Item Type: Article
ISSNs: 0924-4247 (print)
Related URLs:
Subjects: T Technology > TJ Mechanical engineering and machinery
Divisions: University Structure - Pre August 2011 > School of Engineering Sciences > Engineering Materials & Surface Engineering
ePrint ID: 42963
Date Deposited: 05 Jan 2007
Last Modified: 27 Mar 2014 18:27
Contact Email Address: spearing@soton.ac.uk
URI: http://eprints.soton.ac.uk/id/eprint/42963

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