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Characterization of frequency tuning using focused ion beam platinum deposition

Characterization of frequency tuning using focused ion beam platinum deposition
Characterization of frequency tuning using focused ion beam platinum deposition
This paper presents and characterises Focused Ion Beam (FIB) platinum (Pt) deposition as a novel frequency tuning method for micromechanical resonators. FIB Pt deposited tuning was performed at room temperature and in contrast to other reported methods, frequency changes were achieved without any device failure. To perform the tuning, Pt was deposited on a 13µm×5µm surface area at the free end of 3C silicon carbide (SiC) and polysilicon cantilever resonators in thicknesses ranging from 0.5µm to 2.6µm. To determine the amount of tuning, the resonant frequency of SiC and polysilicon devices was measured before and after Pt deposition. Frequency measurements performed before Pt deposition found that SiC resonators operated at a higher resonant frequencies and quality (Q)-factors than their polysilicon counterparts. Measurements after Pt deposition on SiC and polysilicon resonators confirmed the predicted maximum frequency change of -15.5% made by FEM simulations and analytical modelling. Due to their lower mass, polysilicon resonators showed a larger frequency change than their SiC counterparts. A Q-factor decrease was observed for SiC and polysilicon resonators due to thermoelastic damping associated with the deposited Pt and surface contamination
0960-1317
213-219
Enderling, Stefan
39c89aa7-aea0-45e5-aed6-89a6a2dd5dae
Hedley, John
7a3d83a4-7d15-4802-8d92-1f48e9a41df7
Jiang, Liudi
374f2414-51f0-418f-a316-e7db0d6dc4d1
Cheung, Rebecca
331f20bf-d60d-42ba-90ad-82a6cb16af30
Zorman, Christian
27895070-58bd-4254-bd4b-52f661754d99
Mehregany, Mehran
4c237cd9-e2a0-4459-9517-a927d6cf860d
Walton, Anthony J.
9e502805-aabc-46a5-96be-1faac460220f
Enderling, Stefan
39c89aa7-aea0-45e5-aed6-89a6a2dd5dae
Hedley, John
7a3d83a4-7d15-4802-8d92-1f48e9a41df7
Jiang, Liudi
374f2414-51f0-418f-a316-e7db0d6dc4d1
Cheung, Rebecca
331f20bf-d60d-42ba-90ad-82a6cb16af30
Zorman, Christian
27895070-58bd-4254-bd4b-52f661754d99
Mehregany, Mehran
4c237cd9-e2a0-4459-9517-a927d6cf860d
Walton, Anthony J.
9e502805-aabc-46a5-96be-1faac460220f

Enderling, Stefan, Hedley, John, Jiang, Liudi, Cheung, Rebecca, Zorman, Christian, Mehregany, Mehran and Walton, Anthony J. (2007) Characterization of frequency tuning using focused ion beam platinum deposition. Journal of Micromechenics and Microengineering, 17, 213-219. (doi:10.1088/0960-1317/17/2/005).

Record type: Article

Abstract

This paper presents and characterises Focused Ion Beam (FIB) platinum (Pt) deposition as a novel frequency tuning method for micromechanical resonators. FIB Pt deposited tuning was performed at room temperature and in contrast to other reported methods, frequency changes were achieved without any device failure. To perform the tuning, Pt was deposited on a 13µm×5µm surface area at the free end of 3C silicon carbide (SiC) and polysilicon cantilever resonators in thicknesses ranging from 0.5µm to 2.6µm. To determine the amount of tuning, the resonant frequency of SiC and polysilicon devices was measured before and after Pt deposition. Frequency measurements performed before Pt deposition found that SiC resonators operated at a higher resonant frequencies and quality (Q)-factors than their polysilicon counterparts. Measurements after Pt deposition on SiC and polysilicon resonators confirmed the predicted maximum frequency change of -15.5% made by FEM simulations and analytical modelling. Due to their lower mass, polysilicon resonators showed a larger frequency change than their SiC counterparts. A Q-factor decrease was observed for SiC and polysilicon resonators due to thermoelastic damping associated with the deposited Pt and surface contamination

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More information

Published date: 2007
Organisations: Engineering Mats & Surface Engineerg Gp

Identifiers

Local EPrints ID: 43605
URI: http://eprints.soton.ac.uk/id/eprint/43605
ISSN: 0960-1317
PURE UUID: ebf4f91f-906e-4e0c-a117-0162addc4619
ORCID for Liudi Jiang: ORCID iD orcid.org/0000-0002-3400-825X

Catalogue record

Date deposited: 25 Jan 2007
Last modified: 16 Mar 2024 03:47

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Contributors

Author: Stefan Enderling
Author: John Hedley
Author: Liudi Jiang ORCID iD
Author: Rebecca Cheung
Author: Christian Zorman
Author: Mehran Mehregany
Author: Anthony J. Walton

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