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Design and modeling of a high-speed AFM -scanner

Design and modeling of a high-speed AFM -scanner
Design and modeling of a high-speed AFM -scanner
A new mechanical scanner design for a high-speed atomic force microscope (AFM) is presented and discussed in terms of modeling and control. The positioning range of this scanner is 13 $mu$ m in the $X$- and $Y$-directions and 4.3 $mu$m in the vertical direction. The lowest resonance frequency of this scanner is above 22 kHz. This paper is focused on the vertical direction of the scanner, being the crucial axis of motion with the highest precision and bandwidth requirements for gentle imaging with the AFM. A second- and a fourth–order mathematical model of the scanner are derived that allow new insights into important design parameters. Proportional–integral (PI)-feedback control of the high-speed scanner is discussed and the performance of the new AFM is demonstrated by imaging a calibration grating and a biological sample at 8 frames/s.
atomic force microscopy, fast scanning, mechatronics, nanotechnology, precision positioning, real time imaging
1063-6536
906-915
Schitter, Georg
a75aafc7-0804-4bbc-a2ee-792a17aed5fa
Astrom, Karl J.
ce4aa604-bb77-457d-8cb2-5e30bf710265
DeMartini, Barry E.
4a80ba11-cee6-41ae-a241-a7b0a1f41750
Thurner, Philipp J.
ab711ddd-784e-48de-aaad-f56aec40f84f
Turner, Kim L.
43c9530d-1a0b-40ec-a4e5-d72efc310fa1
Hansma, Paul K.
aeab95c4-0f23-4690-8302-72db3316215d
Schitter, Georg
a75aafc7-0804-4bbc-a2ee-792a17aed5fa
Astrom, Karl J.
ce4aa604-bb77-457d-8cb2-5e30bf710265
DeMartini, Barry E.
4a80ba11-cee6-41ae-a241-a7b0a1f41750
Thurner, Philipp J.
ab711ddd-784e-48de-aaad-f56aec40f84f
Turner, Kim L.
43c9530d-1a0b-40ec-a4e5-d72efc310fa1
Hansma, Paul K.
aeab95c4-0f23-4690-8302-72db3316215d

Schitter, Georg, Astrom, Karl J., DeMartini, Barry E., Thurner, Philipp J., Turner, Kim L. and Hansma, Paul K. (2007) Design and modeling of a high-speed AFM -scanner. IEEE Transactions on Control Systems Technology, 15 (5), 906-915. (doi:10.1109/TCST.2007.902953).

Record type: Article

Abstract

A new mechanical scanner design for a high-speed atomic force microscope (AFM) is presented and discussed in terms of modeling and control. The positioning range of this scanner is 13 $mu$ m in the $X$- and $Y$-directions and 4.3 $mu$m in the vertical direction. The lowest resonance frequency of this scanner is above 22 kHz. This paper is focused on the vertical direction of the scanner, being the crucial axis of motion with the highest precision and bandwidth requirements for gentle imaging with the AFM. A second- and a fourth–order mathematical model of the scanner are derived that allow new insights into important design parameters. Proportional–integral (PI)-feedback control of the high-speed scanner is discussed and the performance of the new AFM is demonstrated by imaging a calibration grating and a biological sample at 8 frames/s.

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More information

Published date: September 2007
Keywords: atomic force microscopy, fast scanning, mechatronics, nanotechnology, precision positioning, real time imaging

Identifiers

Local EPrints ID: 48811
URI: http://eprints.soton.ac.uk/id/eprint/48811
ISSN: 1063-6536
PURE UUID: d454c584-349d-4e43-b0ce-438221a570be
ORCID for Philipp J. Thurner: ORCID iD orcid.org/0000-0001-7588-9041

Catalogue record

Date deposited: 15 Oct 2007
Last modified: 15 Mar 2024 09:50

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Contributors

Author: Georg Schitter
Author: Karl J. Astrom
Author: Barry E. DeMartini
Author: Kim L. Turner
Author: Paul K. Hansma

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