A comparison of precision optical displacement sensors for the 3-D measurement of complex surface profiles. [In special issue: Eurosensors XX The 20th European conference on Solid-State Transducers - Eurosensors 2006, Eurosensors 20th Edition]
Boltryk, Peter J., Hill, Martyn, McBride, John W. and Nascè, Antony (2008) A comparison of precision optical displacement sensors for the 3-D measurement of complex surface profiles. [In special issue: Eurosensors XX The 20th European conference on Solid-State Transducers - Eurosensors 2006, Eurosensors 20th Edition]. Sensors and Actuators A: Physical, 142, (1), 2-11. (doi:10.1016/j.sna.2007.03.006).
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Description/Abstract
Non-contact optical sensors, combined with a raster scanning system, can be used in surface metrology applications such as MEMS processing to build high-precision topological surface maps representing the surface profile. We compare three optical displacement sensors for the measurement of complex surfaces, focussing on early sound recordings, and recommend sensor selection based on parameters including measurement area, time and resolution.
| Item Type: | Article |
|---|---|
| ISSNs: | 0924-4247 (print) |
| Keywords: | non-contact metrology, optical displacement sensor, profilometer, sound recovery |
| Subjects: | Q Science > QC Physics T Technology > TA Engineering (General). Civil engineering (General) |
| Divisions: | University Structure - Pre August 2011 > School of Engineering Sciences > Electro-Mechanical Engineering |
| Item ID: | 49060 |
| Date Deposited: | 25 Oct 2007 |
| Last Modified: | 01 Jun 2012 15:02 |
| Contributors: | Boltryk, Peter J. (Author) Hill, Martyn (Author) McBride, John W. (Author) Nascè, Antony (Author) |
| Date: | 10 March 2008 |
| Status: | Published |
| Contact Email Address: | boltryk@soton.ac.uk |
| URI: | http://eprints.soton.ac.uk/id/eprint/49060 |
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