Novel actuation of an integrated peristaltic micropump
Husband, B., Bu, M., Apostolopoulos, V., Melvin, T. and Evans, A.G.R. (2004) Novel actuation of an integrated peristaltic micropump. Microelectronic Engineering, 73-74, 858-863. (doi:10.1016/j.mee.2004.03.065).
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Description/Abstract
The design and production of sequencing and driver circuits to operate a peristaltic silicon micro pump integrated within a lab-on-a-chip are described. The micropump consists of three serial elements composed of piezoelectric discs glued to a 200 μm glass diaphragm, which upon actuation rise from connecting channels. Sequential actuation of the elements within the micropump in the desired fashion has been shown to pump a one microlitre droplet of water back and forth in a controlled way through the reaction chambers in the lab-on-a-chip. Two electrical circuits have been created and tested and are presented here. The relationship of the relative deflection of the three piezoelectric disks glued to a 200 μm glass diaphragm versus applied voltage has been evaluated using a Michelson interferometer. The novel actuation method developed here has successfully operated the pump and the interferometric method can now be used to optimize the pump.
| Item Type: | Article |
|---|---|
| ISSNs: | 0167-9317 (print) |
| Related URLs: | |
| Keywords: | micropump, peristaltic, michelson interferometer, BioMEMS, μTAS, micro-fluidics |
| Subjects: | Q Science > QB Astronomy Q Science > QD Chemistry Q Science > QC Physics |
| Divisions: | University Structure - Pre August 2011 > School of Electronics and Computer Science > Nano-Scale Integration Group University Structure - Pre August 2011 > Optoelectronics Research Centre University Structure - Pre August 2011 > School of Physics and Astronomy University Structure - Pre August 2011 > School of Electronics and Computer Science > Microelectronics Industrial Unit |
| Item ID: | 57313 |
| Date Deposited: | 13 Aug 2008 |
| Last Modified: | 18 Aug 2012 02:51 |
| Contributors: | Husband, B. (Author) Bu, M. (Author) Apostolopoulos, V. (Author) Melvin, T. (Author) Evans, A.G.R. (Author) |
| Date: | June 2004 |
| Status: | Published |
| URI: | http://eprints.soton.ac.uk/id/eprint/57313 |
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