Fabrication of a microfluidic chip for PCR applications

Bu, M., Husband, B., Melvin, T., Ensell, G.J., Pham, N.P., Sarro, P.M., Wilkinson, J.S. and Evans, A.G.R. (2003) Fabrication of a microfluidic chip for PCR applications. In, 14th MicroMechanics Europe Workshop, Delft, The Netherlands, 02 - 04 Nov 2003.


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The fabrication of a microfluidic chip for application to polymerase chain (PCR) is presented. In this chip, a micro peristaltic pump was integrated to pump a reactant droplet. PCR reaction chambers, Pt heaters, temperature sensors, and pn-diodes were fabricated on a silicon wafer. Access holes for fluid and electrical connections, and pump membranes were etched in a Pyrex wafer, which was anodically bonded onto the silicon. Three PZT discs were glued on pump membranes to actuate the micro peristaltic pump.

Item Type: Conference or Workshop Item (Paper)
Related URLs:
Subjects: Q Science
T Technology > TK Electrical engineering. Electronics Nuclear engineering
T Technology
Q Science > QC Physics
Divisions : University Structure - Pre August 2011 > Optoelectronics Research Centre
ePrint ID: 57744
Accepted Date and Publication Date:
November 2003Published
Date Deposited: 11 Aug 2008
Last Modified: 31 Mar 2016 12:38
URI: http://eprints.soton.ac.uk/id/eprint/57744

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