The scaling of strength in the design of high-power MEMS structures

Noonan, Erin E, Peles, Yoav, Protz, Christopher S. and Spearing, Simon Mark (2008) The scaling of strength in the design of high-power MEMS structures. Scripta Materialia, 59, (9), 927-930. (doi:10.1016/j.scriptamat.2008.03.045).


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The prediction of the strength of complicated structures based on material test data is important for high-power density microelectromechanical systems. Probalistic analysis is used to predict the strength of pressure-tested microfabricated silicon structures from simpler test specimens. The predictions are found to be non-conservative. This is probably due to interactions between the etching process and the structural geometry, which changes the flaw distribution between the two statistical populations. In both cases secondary smoothing etches recover the strength.

Item Type: Article
Digital Object Identifier (DOI): doi:10.1016/j.scriptamat.2008.03.045
ISSNs: 1359-6462 (print)
Related URLs:
Keywords: microelectromechanical systems, silicon, fracture, weakest link statistics, fractography
Subjects: T Technology > TJ Mechanical engineering and machinery
T Technology > TN Mining engineering. Metallurgy
Divisions : University Structure - Pre August 2011 > School of Engineering Sciences > Engineering Materials & Surface Engineering
ePrint ID: 64555
Accepted Date and Publication Date:
November 2008Published
Date Deposited: 23 Dec 2008
Last Modified: 31 Mar 2016 12:49

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