Investigation of gold sputter coated vertically aligned multi-walled carbon nanotubes for RF MEMS contact surfaces.
Yunus, Esa, Spearing, Mark and McBride, John (2008) Investigation of gold sputter coated vertically aligned multi-walled carbon nanotubes for RF MEMS contact surfaces. In, Spearing, S.M., Vengallatore, S., Sheppard, N. and Bagdahn, J. (eds.) Microelectromechanical Systems—Materials and Devices II. MRS Fall Meeting Warrendale, USA, Materials Research Society. (MRS Proceedings 1139). (doi:10.1557/PROC-1139-GG05-04).
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Description/Abstract
A novel approach has been developed for the long-standing problem of achieving durable contact surfaces for Radio Frequency MEMS switches. The performance of gold-coated vertically aligned multi-walled carbon nanotubes is investigated under the low force electrical contact conditions typical of MEMS switches. The carbon nanotubes provide a compliant support for the conducting gold surface layer, minimizing the degradation, and adhesion between the contact surfaces which is the principal source of wear in such contacts. Greatly increased lifetimes have been obtained over monolithic gold contact surfaces
| Item Type: | Book Section |
|---|---|
| Additional Information: | Paper #: 1139-GG05-04 |
| Related URLs: | |
| Subjects: | T Technology > TK Electrical engineering. Electronics Nuclear engineering Q Science > QC Physics |
| Divisions: | University Structure - Pre August 2011 > School of Engineering Sciences > Electro-Mechanical Engineering |
| Item ID: | 69325 |
| Date Deposited: | 04 Nov 2009 |
| Last Modified: | 08 Jun 2012 12:31 |
| Contributors: | Yunus, Esa (Author) Spearing, Mark (Author) McBride, John (Author) Spearing, S.M. (Editor) Vengallatore, S. (Editor) Sheppard, N. (Editor) Bagdahn, J. (Editor) |
| Date: | 2008 |
| Additional Information: | Paper #: 1139-GG05-04 |
| Status: | Published |
| Publisher: | Materials Research Society |
| URI: | http://eprints.soton.ac.uk/id/eprint/69325 |
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