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Flow monitoring in optofluidic channels using planar Bragg gratings

Flow monitoring in optofluidic channels using planar Bragg gratings
Flow monitoring in optofluidic channels using planar Bragg gratings
An integrated pressure/flow sensor using a direct UV written planar Bragg grating situated inside a flexible diaphragm of thickness 200 microns has been fabricated. The diaphragm is created by etching away the underlying silicon support.
Holmes, C.
16306bb8-8a46-4fd7-bb19-a146758e5263
Gates, J.C.
b71e31a1-8caa-477e-8556-b64f6cae0dc2
Gawith, C.B.E.
926665c0-84c7-4a1d-ae19-ee6d7d14c43e
Smith, P.G.R.
8979668a-8b7a-4838-9a74-1a7cfc6665f6
Holmes, C.
16306bb8-8a46-4fd7-bb19-a146758e5263
Gates, J.C.
b71e31a1-8caa-477e-8556-b64f6cae0dc2
Gawith, C.B.E.
926665c0-84c7-4a1d-ae19-ee6d7d14c43e
Smith, P.G.R.
8979668a-8b7a-4838-9a74-1a7cfc6665f6

Holmes, C., Gates, J.C., Gawith, C.B.E. and Smith, P.G.R. (2009) Flow monitoring in optofluidic channels using planar Bragg gratings. International Quantum Electronics Conference CLEO/IQEC 2009, , Baltimore, Maryland. 31 May - 05 Jun 2009.

Record type: Conference or Workshop Item (Paper)

Abstract

An integrated pressure/flow sensor using a direct UV written planar Bragg grating situated inside a flexible diaphragm of thickness 200 microns has been fabricated. The diaphragm is created by etching away the underlying silicon support.

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More information

Published date: 31 May 2009
Venue - Dates: International Quantum Electronics Conference CLEO/IQEC 2009, , Baltimore, Maryland, 2009-05-31 - 2009-06-05
Related URLs:
Learn more about Optoelectronics Research Centre research

Identifiers

Local EPrints ID: 78994
URI: http://eprints.soton.ac.uk/id/eprint/78994
PURE UUID: 792f16cd-603e-4b9b-ab1d-be51b5e6c90e
ORCID for C. Holmes: ORCID iD orcid.org/0000-0001-9021-3760
ORCID for J.C. Gates: ORCID iD orcid.org/0000-0001-8671-5987
ORCID for C.B.E. Gawith: ORCID iD orcid.org/0000-0002-3502-3558
ORCID for P.G.R. Smith: ORCID iD orcid.org/0000-0003-0319-718X

Catalogue record

Date deposited: 19 Mar 2010
Last modified: 14 Mar 2024 02:52

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Contributors

Author: C. Holmes ORCID iD
Author: J.C. Gates ORCID iD
Author: C.B.E. Gawith ORCID iD
Author: P.G.R. Smith ORCID iD

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