Multiscale mechanics modeling of direct silicon wafer bonding
Multiscale mechanics modeling of direct silicon wafer bonding
The direct bonding of macroscopically patterned silicon wafers is studied with a cohesive zone model (CZM), the form and key parameters of which are obtained from molecular dynamics simulations. The CZM is implemented in a spectral scheme. For the case of ideally flat wafer surfaces investigated here, the results are consistent with previous work in which the CZM was derived from an assumption of a continuum water film. This multiscale approach has the potential to model directly the effects of surface roughness, nanotopography and small-scale patterning on the efficacy of direct wafer bonding.
1125-1128
Kubair, Dhirendra
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Cole, Daniel J.
cb208a53-13ef-4871-b59b-6373abaadc39
Ciacci, Lucio C.
3da50502-02f6-40ac-99bd-03cefd2a7e3d
Spearing, Simon Mark
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June 2009
Kubair, Dhirendra
7d4a8f36-e23f-444a-b9f0-a9d13bdc89d0
Cole, Daniel J.
cb208a53-13ef-4871-b59b-6373abaadc39
Ciacci, Lucio C.
3da50502-02f6-40ac-99bd-03cefd2a7e3d
Spearing, Simon Mark
9e56a7b3-e0e8-47b1-a6b4-db676ed3c17a
Kubair, Dhirendra, Cole, Daniel J., Ciacci, Lucio C. and Spearing, Simon Mark
(2009)
Multiscale mechanics modeling of direct silicon wafer bonding.
Scripta Materialia, 60 (12), .
(doi:10.1016/j.scriptamat.2009.02.058).
Abstract
The direct bonding of macroscopically patterned silicon wafers is studied with a cohesive zone model (CZM), the form and key parameters of which are obtained from molecular dynamics simulations. The CZM is implemented in a spectral scheme. For the case of ideally flat wafer surfaces investigated here, the results are consistent with previous work in which the CZM was derived from an assumption of a continuum water film. This multiscale approach has the potential to model directly the effects of surface roughness, nanotopography and small-scale patterning on the efficacy of direct wafer bonding.
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Submitted date: February 2009
Published date: June 2009
Organisations:
Engineering Mats & Surface Engineerg Gp
Identifiers
Local EPrints ID: 79461
URI: http://eprints.soton.ac.uk/id/eprint/79461
ISSN: 1359-6462
PURE UUID: 9fc48d2e-0add-4e58-bf88-7807ce55be74
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Date deposited: 16 Mar 2010
Last modified: 14 Mar 2024 02:49
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Contributors
Author:
Dhirendra Kubair
Author:
Daniel J. Cole
Author:
Lucio C. Ciacci
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