Physical sensitivity of silica micro-cantilevers fabricated using direct UV writing and micromachining
Physical sensitivity of silica micro-cantilevers fabricated using direct UV writing and micromachining
A silica micro-cantilever with intrinsically defined channel waveguide containing Bragg gratings has been fabricated using a combination of direct UV writing and physical micromachining. Through optically monitoring the response of the Bragg gratings defined within the cantilever, induced stresses can be measured at multiple locations along its length permitting multiplexed physical sensitivity. The fabricated silica cantilever is 61 µm wide, 41 µm thick and 3 mm in length. It contains three Bragg gratings and can attain ~70 nm deflection resolution.
26-30
Holmes, Christopher
16306bb8-8a46-4fd7-bb19-a146758e5263
Carpenter, Lewis
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Rogers, Helen
c6b6aa89-b14c-48b6-92c0-dd5c5bca683c
Gates, James C.
b71e31a1-8caa-477e-8556-b64f6cae0dc2
Smith, Peter G.R.
8979668a-8b7a-4838-9a74-1a7cfc6665f6
March 2011
Holmes, Christopher
16306bb8-8a46-4fd7-bb19-a146758e5263
Carpenter, Lewis
0daa548e-0d42-4b06-b914-45bfbec41759
Rogers, Helen
c6b6aa89-b14c-48b6-92c0-dd5c5bca683c
Gates, James C.
b71e31a1-8caa-477e-8556-b64f6cae0dc2
Smith, Peter G.R.
8979668a-8b7a-4838-9a74-1a7cfc6665f6
Holmes, Christopher, Carpenter, Lewis, Rogers, Helen, Gates, James C. and Smith, Peter G.R.
(2011)
Physical sensitivity of silica micro-cantilevers fabricated using direct UV writing and micromachining.
Journal of Laser Micro/Nanoengineering, 6 (1), .
(doi:10.2961/jlmn.2011.01.0007).
Abstract
A silica micro-cantilever with intrinsically defined channel waveguide containing Bragg gratings has been fabricated using a combination of direct UV writing and physical micromachining. Through optically monitoring the response of the Bragg gratings defined within the cantilever, induced stresses can be measured at multiple locations along its length permitting multiplexed physical sensitivity. The fabricated silica cantilever is 61 µm wide, 41 µm thick and 3 mm in length. It contains three Bragg gratings and can attain ~70 nm deflection resolution.
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More information
Published date: March 2011
Organisations:
Optoelectronics Research Centre, Electronics & Computer Science, Quantum, Light & Matter Group
Identifiers
Local EPrints ID: 191187
URI: http://eprints.soton.ac.uk/id/eprint/191187
ISSN: 1880-0688
PURE UUID: 7f1a694d-51c6-4d0f-bee4-b1f651c649ef
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Date deposited: 17 Jun 2011 10:59
Last modified: 15 Mar 2024 03:27
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Contributors
Author:
Lewis Carpenter
Author:
Helen Rogers
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