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The Effect of Deposition of Temperature on LPCVD Polysilicon

The Effect of Deposition of Temperature on LPCVD Polysilicon
The Effect of Deposition of Temperature on LPCVD Polysilicon
French, P J
96a038f4-a5bb-459f-b608-a5b3cf32cd32
Evans, A G R
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French, P J
96a038f4-a5bb-459f-b608-a5b3cf32cd32
Evans, A G R
c4a3f208-8fd9-491d-870f-ce7eef943311

French, P J and Evans, A G R (1986) The Effect of Deposition of Temperature on LPCVD Polysilicon.

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More information

Published date: 1986
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 250996
URI: http://eprints.soton.ac.uk/id/eprint/250996
PURE UUID: b5773b3b-7593-4835-9055-71e47a94a9b1

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Date deposited: 08 Oct 1999
Last modified: 10 Dec 2021 20:19

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Contributors

Author: P J French
Author: A G R Evans

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