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Rapid thermal processing in semiconductor technology

Rapid thermal processing in semiconductor technology
Rapid thermal processing in semiconductor technology
Hart, M J
e4833057-eb19-44aa-9b1c-c86de054a920
Evans, A G R
c4a3f208-8fd9-491d-870f-ce7eef943311
Hart, M J
e4833057-eb19-44aa-9b1c-c86de054a920
Evans, A G R
c4a3f208-8fd9-491d-870f-ce7eef943311

Hart, M J and Evans, A G R (1988) Rapid thermal processing in semiconductor technology.

Record type: Other

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More information

Published date: 1988
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 251006
URI: http://eprints.soton.ac.uk/id/eprint/251006
PURE UUID: 90c2b7e4-c6f9-4d97-b970-e2139ee05d3e

Catalogue record

Date deposited: 11 Oct 1999
Last modified: 10 Dec 2021 20:19

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Contributors

Author: M J Hart
Author: A G R Evans

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