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The effects of RTA on CMOS devices

The effects of RTA on CMOS devices
The effects of RTA on CMOS devices
Murray, D C
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Evans, A G R
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Atrip, J L
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Carter, J C
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Murray, D C
2bce70f8-76ce-4693-bd84-22f43561e746
Evans, A G R
c4a3f208-8fd9-491d-870f-ce7eef943311
Atrip, J L
a1fb9f18-3821-4547-92d8-b0082c0c4220
Carter, J C
6a4e2120-5d03-4621-9ebc-ba8901e40e7a

Murray, D C, Evans, A G R, Atrip, J L and Carter, J C (1990) The effects of RTA on CMOS devices.

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More information

Published date: 1990
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 251024
URI: http://eprints.soton.ac.uk/id/eprint/251024
PURE UUID: d50620a9-dc21-4764-a283-67efe1983673

Catalogue record

Date deposited: 11 Oct 1999
Last modified: 10 Dec 2021 20:19

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Contributors

Author: D C Murray
Author: A G R Evans
Author: J L Atrip
Author: J C Carter

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