Farooqui, M M, Evans, A G R, Stedman, M and Haycocks, J (1992) Micromachined silicon sensors for atomic force microscopy.
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More information
Published date: 1992
Organisations:
Nanoelectronics and Nanotechnology
Identifiers
Local EPrints ID: 251157
URI: http://eprints.soton.ac.uk/id/eprint/251157
PURE UUID: b680c9ed-e3da-4e49-aecf-e7b5c3312c97
Catalogue record
Date deposited: 12 Oct 1999
Last modified: 10 Dec 2021 20:20
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Contributors
Author:
M M Farooqui
Author:
A G R Evans
Author:
M Stedman
Author:
J Haycocks
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