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Investigation of boron diffusion in polysilicon and its application to the design of pnp polysilicon emitter bipolar transistors with shallow emitter junctions

Investigation of boron diffusion in polysilicon and its application to the design of pnp polysilicon emitter bipolar transistors with shallow emitter junctions
Investigation of boron diffusion in polysilicon and its application to the design of pnp polysilicon emitter bipolar transistors with shallow emitter junctions
Post, I R C
20c72d45-7b72-4df1-a487-a23f6b06511e
Ashburn, Peter
68cef6b7-205b-47aa-9efb-f1f09f5c1038
Post, I R C
20c72d45-7b72-4df1-a487-a23f6b06511e
Ashburn, Peter
68cef6b7-205b-47aa-9efb-f1f09f5c1038

Post, I R C and Ashburn, Peter (1991) Investigation of boron diffusion in polysilicon and its application to the design of pnp polysilicon emitter bipolar transistors with shallow emitter junctions.

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Published date: 1991
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 251198
URI: http://eprints.soton.ac.uk/id/eprint/251198
PURE UUID: 0d56c0e4-9b1b-496e-b4e3-6f7d06fc1a9c

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Date deposited: 19 Oct 1999
Last modified: 10 Dec 2021 20:20

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Contributors

Author: I R C Post
Author: Peter Ashburn

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