Micro-cantilever resonance measured using sound excitation
Micro-cantilever resonance measured using sound excitation
This paper describes sound-excited vibrations of a silicon cantilever resonator for measuring its resonant frequencies. A strain gauge resistor integrated in the cantilever is used as a sensing element. The experimental setup greatly simplifies the measurement system and is sensitive and easy to operate compared with optical sensing methods. The measured resonant frequencies of the micro-cantilever resonator are in good agreement with the theoretical predictions from FE modeling.
140-143
Su, Y.
06c79b8f-8716-45a9-b623-f0cab0bb2e3e
Evans, A.G.R.
082f720d-3830-46d7-ba87-b058af733bc3
Brunnschweiler, A.
2d39ef7c-b95e-476c-b435-316b6618a565
Ensell, G.
48fe0996-1c6b-4816-8bd0-0a3234d36ae8
September 1997
Su, Y.
06c79b8f-8716-45a9-b623-f0cab0bb2e3e
Evans, A.G.R.
082f720d-3830-46d7-ba87-b058af733bc3
Brunnschweiler, A.
2d39ef7c-b95e-476c-b435-316b6618a565
Ensell, G.
48fe0996-1c6b-4816-8bd0-0a3234d36ae8
Su, Y., Evans, A.G.R., Brunnschweiler, A. and Ensell, G.
(1997)
Micro-cantilever resonance measured using sound excitation.
MME '97, Southampton.
.
Record type:
Conference or Workshop Item
(Paper)
Abstract
This paper describes sound-excited vibrations of a silicon cantilever resonator for measuring its resonant frequencies. A strain gauge resistor integrated in the cantilever is used as a sensing element. The experimental setup greatly simplifies the measurement system and is sensitive and easy to operate compared with optical sensing methods. The measured resonant frequencies of the micro-cantilever resonator are in good agreement with the theoretical predictions from FE modeling.
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More information
Published date: September 1997
Venue - Dates:
MME '97, Southampton, 1997-08-31
Organisations:
Nanoelectronics and Nanotechnology
Identifiers
Local EPrints ID: 252448
URI: http://eprints.soton.ac.uk/id/eprint/252448
PURE UUID: 7dedcbbd-6c7a-48f5-be0d-6118f3ecd7ff
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Date deposited: 28 Jan 2000
Last modified: 10 Dec 2021 20:27
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Contributors
Author:
Y. Su
Author:
A.G.R. Evans
Author:
A. Brunnschweiler
Author:
G. Ensell
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