The University of Southampton
University of Southampton Institutional Repository

Measurements of very long generation lifetimes in Si and SiGe epi-layers produced by LPCVD using MOS capacitors formed by plasma anodisation

Measurements of very long generation lifetimes in Si and SiGe epi-layers produced by LPCVD using MOS capacitors formed by plasma anodisation
Measurements of very long generation lifetimes in Si and SiGe epi-layers produced by LPCVD using MOS capacitors formed by plasma anodisation
Wu, Z Y
79ca95d2-724c-4b77-9784-2a4b2ec54fd0
Hall, S
f4a3297d-bb12-404d-9a02-f082ba4cbfb0
Bonar, J M
5ee6b25a-3e67-4a6d-9854-5e1e079d50b8
Parker, G J
b140c5a5-94c4-44f3-95a3-c5054a9fe38d
Wu, Z Y
79ca95d2-724c-4b77-9784-2a4b2ec54fd0
Hall, S
f4a3297d-bb12-404d-9a02-f082ba4cbfb0
Bonar, J M
5ee6b25a-3e67-4a6d-9854-5e1e079d50b8
Parker, G J
b140c5a5-94c4-44f3-95a3-c5054a9fe38d

Wu, Z Y, Hall, S, Bonar, J M and Parker, G J (1997) Measurements of very long generation lifetimes in Si and SiGe epi-layers produced by LPCVD using MOS capacitors formed by plasma anodisation.

Record type: Other

This record has no associated files available for download.

More information

Published date: May 1997
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 252491
URI: http://eprints.soton.ac.uk/id/eprint/252491
PURE UUID: 2fe0b20a-6415-4df8-88f5-2e8e74750ace

Catalogue record

Date deposited: 31 Jan 2000
Last modified: 08 Jan 2022 17:36

Export record

Contributors

Author: Z Y Wu
Author: S Hall
Author: J M Bonar
Author: G J Parker

Download statistics

Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.

View more statistics

Atom RSS 1.0 RSS 2.0

Contact ePrints Soton: eprints@soton.ac.uk

ePrints Soton supports OAI 2.0 with a base URL of http://eprints.soton.ac.uk/cgi/oai2

This repository has been built using EPrints software, developed at the University of Southampton, but available to everyone to use.

We use cookies to ensure that we give you the best experience on our website. If you continue without changing your settings, we will assume that you are happy to receive cookies on the University of Southampton website.

×