Thick film printing of PZT onto Silicon for micromechanical applications
Thick film printing of PZT onto Silicon for micromechanical applications
Harris, N
5f9fc185-56c0-4fdf-b66c-e4c9bea80ab4
Koch, M
afb525c3-6353-4bac-93f6-a77de2881db7
Beevy, S
4dd5bfa4-9756-40fa-a285-f0547183a938
White, N M
ce98ce88-d529-4982-9095-8e88274a523f
Evans, A G R
c4a3f208-8fd9-491d-870f-ce7eef943311
9 February 2000
Harris, N
5f9fc185-56c0-4fdf-b66c-e4c9bea80ab4
Koch, M
afb525c3-6353-4bac-93f6-a77de2881db7
Beevy, S
4dd5bfa4-9756-40fa-a285-f0547183a938
White, N M
ce98ce88-d529-4982-9095-8e88274a523f
Evans, A G R
c4a3f208-8fd9-491d-870f-ce7eef943311
Harris, N, Koch, M, Beevy, S, White, N M and Evans, A G R
(2000)
Thick film printing of PZT onto Silicon for micromechanical applications.
This record has no associated files available for download.
More information
Published date: 9 February 2000
Additional Information:
Procceding of MM'98 Ulvik, Norway.
Organisations:
Nanoelectronics and Nanotechnology
Identifiers
Local EPrints ID: 252510
URI: http://eprints.soton.ac.uk/id/eprint/252510
PURE UUID: 82ce1899-97cd-4411-8db2-7feee9ea134b
Catalogue record
Date deposited: 09 Feb 2000
Last modified: 27 Sep 2021 16:31
Export record
Contributors
Author:
N Harris
Author:
M Koch
Author:
S Beevy
Author:
N M White
Author:
A G R Evans
Download statistics
Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.
View more statistics