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A new semiconductor deposition system

A new semiconductor deposition system
A new semiconductor deposition system
0854323821
Parker, G.J.
b140c5a5-94c4-44f3-95a3-c5054a9fe38d
Starbuck, C.M.K.
a85acc65-f4ee-46aa-a608-817d9993f8fd
Parker, G.J.
b140c5a5-94c4-44f3-95a3-c5054a9fe38d
Starbuck, C.M.K.
a85acc65-f4ee-46aa-a608-817d9993f8fd

Parker, G.J. and Starbuck, C.M.K. (1991) A new semiconductor deposition system.

Record type: Other

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More information

Published date: 1991
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 252783
URI: http://eprints.soton.ac.uk/id/eprint/252783
ISBN: 0854323821
PURE UUID: 1b32ca3d-ca72-4b63-9f7c-10103d6b6917

Catalogue record

Date deposited: 21 Mar 2000
Last modified: 10 Dec 2021 20:29

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Contributors

Author: G.J. Parker
Author: C.M.K. Starbuck

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