Ensell, G.J. (1995) Alignment of mask patterns to crystal orientation.
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Published date: June 1995
Additional Information:
Technical Digest of Transducers '95 Eurosensors IX, the 8th International Conference on Solid-State Sensors and Actuators, Stockholm, Sweden.
Organisations:
Nanoelectronics and Nanotechnology
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Local EPrints ID: 252816
URI: http://eprints.soton.ac.uk/id/eprint/252816
PURE UUID: 59490f01-4f22-4001-9e0e-759b079bef50
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Date deposited: 23 Mar 2000
Last modified: 10 Dec 2021 20:29
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Author:
G.J. Ensell
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