Fabrication of improved piezoresistive silicon cantilever probe for the atomic force microscope
Fabrication of improved piezoresistive silicon cantilever probe for the atomic force microscope
This paper describes an improved design for a monolithic silicon atomic force microscope (AFM) probe using piezoresistive sensing. The probe is V shaped, with a sharp tip at the free end and two piezoresistors at the root, and is fabricated using silicon-on-insulator (SOI) starting material. The maximum sensitivity of the AFM probe is measured to be 4.0(± 0.1) × 10-7 Å-1, which is larger than that of the previous parallel-arm piezoresistive AFM probe. The measured results are in reasonable agreement with the values predicted by theory. The minimum detectable force and minimum detectable deflection of the AFM probes are predicted to be 1.0 × 10-10 N and 0.29 Å r.m.s., respectively, using a Wheatstone bridge arrangement biased at a voltage of ± 5 V and bandwidth of 10 Hz – 1kHz.
163-167
Su, Y.
d9db9af4-ecb1-497f-ba4c-f11afbc2a934
Evans, Alan G.R.
493cd0b0-4509-4ad2-9d58-f3533fe47672
Brunnschweiler, A.
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Ensell, Graham J.
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Koch, M.
e40267ab-ad55-409c-9727-3dd53de47374
May 1997
Su, Y.
d9db9af4-ecb1-497f-ba4c-f11afbc2a934
Evans, Alan G.R.
493cd0b0-4509-4ad2-9d58-f3533fe47672
Brunnschweiler, A.
2d39ef7c-b95e-476c-b435-316b6618a565
Ensell, Graham J.
736a04bf-1a14-42c2-928b-ed7af799cd3a
Koch, M.
e40267ab-ad55-409c-9727-3dd53de47374
Su, Y., Evans, Alan G.R., Brunnschweiler, A., Ensell, Graham J. and Koch, M.
(1997)
Fabrication of improved piezoresistive silicon cantilever probe for the atomic force microscope.
Sensors and Actuators A: Physical, 60 (1-3), .
(doi:10.1016/S0924-4247(96)01416-1).
Abstract
This paper describes an improved design for a monolithic silicon atomic force microscope (AFM) probe using piezoresistive sensing. The probe is V shaped, with a sharp tip at the free end and two piezoresistors at the root, and is fabricated using silicon-on-insulator (SOI) starting material. The maximum sensitivity of the AFM probe is measured to be 4.0(± 0.1) × 10-7 Å-1, which is larger than that of the previous parallel-arm piezoresistive AFM probe. The measured results are in reasonable agreement with the values predicted by theory. The minimum detectable force and minimum detectable deflection of the AFM probes are predicted to be 1.0 × 10-10 N and 0.29 Å r.m.s., respectively, using a Wheatstone bridge arrangement biased at a voltage of ± 5 V and bandwidth of 10 Hz – 1kHz.
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Accepted/In Press date: 1996
Published date: May 1997
Venue - Dates:
Eurosensors X, , Leuven, Belgium, 1996-09-08 - 1996-09-11
Organisations:
Nanoelectronics and Nanotechnology
Identifiers
Local EPrints ID: 252820
URI: http://eprints.soton.ac.uk/id/eprint/252820
ISSN: 0924-4247
PURE UUID: f4985844-447a-4a91-b745-82e79be74f5f
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Date deposited: 23 Mar 2000
Last modified: 16 Mar 2024 04:08
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Contributors
Author:
Y. Su
Author:
Alan G.R. Evans
Author:
A. Brunnschweiler
Author:
Graham J. Ensell
Author:
M. Koch
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